JPS5533919U - - Google Patents

Info

Publication number
JPS5533919U
JPS5533919U JP1978115320U JP11532078U JPS5533919U JP S5533919 U JPS5533919 U JP S5533919U JP 1978115320 U JP1978115320 U JP 1978115320U JP 11532078 U JP11532078 U JP 11532078U JP S5533919 U JPS5533919 U JP S5533919U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1978115320U
Other languages
Japanese (ja)
Other versions
JPS584920Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978115320U priority Critical patent/JPS584920Y2/ja
Publication of JPS5533919U publication Critical patent/JPS5533919U/ja
Application granted granted Critical
Publication of JPS584920Y2 publication Critical patent/JPS584920Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Physical Vapour Deposition (AREA)
JP1978115320U 1978-08-23 1978-08-23 酸化亜鉛薄膜の製造装置 Expired JPS584920Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978115320U JPS584920Y2 (ja) 1978-08-23 1978-08-23 酸化亜鉛薄膜の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978115320U JPS584920Y2 (ja) 1978-08-23 1978-08-23 酸化亜鉛薄膜の製造装置

Publications (2)

Publication Number Publication Date
JPS5533919U true JPS5533919U (enrdf_load_stackoverflow) 1980-03-05
JPS584920Y2 JPS584920Y2 (ja) 1983-01-27

Family

ID=29066846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978115320U Expired JPS584920Y2 (ja) 1978-08-23 1978-08-23 酸化亜鉛薄膜の製造装置

Country Status (1)

Country Link
JP (1) JPS584920Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5989763A (ja) * 1983-09-28 1984-05-24 Ricoh Co Ltd 薄膜蒸着装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933890A (enrdf_load_stackoverflow) * 1972-07-29 1974-03-28
JPS5152041U (enrdf_load_stackoverflow) * 1974-10-18 1976-04-20
JPS5489983A (en) * 1977-12-28 1979-07-17 Toshiba Corp Device and method for vacuum deposition compound

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933890A (enrdf_load_stackoverflow) * 1972-07-29 1974-03-28
JPS5152041U (enrdf_load_stackoverflow) * 1974-10-18 1976-04-20
JPS5489983A (en) * 1977-12-28 1979-07-17 Toshiba Corp Device and method for vacuum deposition compound

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5989763A (ja) * 1983-09-28 1984-05-24 Ricoh Co Ltd 薄膜蒸着装置

Also Published As

Publication number Publication date
JPS584920Y2 (ja) 1983-01-27

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