JPS4933890A - - Google Patents

Info

Publication number
JPS4933890A
JPS4933890A JP7631272A JP7631272A JPS4933890A JP S4933890 A JPS4933890 A JP S4933890A JP 7631272 A JP7631272 A JP 7631272A JP 7631272 A JP7631272 A JP 7631272A JP S4933890 A JPS4933890 A JP S4933890A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7631272A
Other languages
Japanese (ja)
Other versions
JPS549592B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7631272A priority Critical patent/JPS549592B2/ja
Publication of JPS4933890A publication Critical patent/JPS4933890A/ja
Publication of JPS549592B2 publication Critical patent/JPS549592B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP7631272A 1972-07-29 1972-07-29 Expired JPS549592B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7631272A JPS549592B2 (enrdf_load_stackoverflow) 1972-07-29 1972-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7631272A JPS549592B2 (enrdf_load_stackoverflow) 1972-07-29 1972-07-29

Publications (2)

Publication Number Publication Date
JPS4933890A true JPS4933890A (enrdf_load_stackoverflow) 1974-03-28
JPS549592B2 JPS549592B2 (enrdf_load_stackoverflow) 1979-04-25

Family

ID=13601841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7631272A Expired JPS549592B2 (enrdf_load_stackoverflow) 1972-07-29 1972-07-29

Country Status (1)

Country Link
JP (1) JPS549592B2 (enrdf_load_stackoverflow)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50128688A (enrdf_load_stackoverflow) * 1974-03-29 1975-10-09
JPS50149591A (enrdf_load_stackoverflow) * 1974-05-22 1975-11-29
JPS5154143U (enrdf_load_stackoverflow) * 1974-10-21 1976-04-24
JPS51101735A (ja) * 1975-03-06 1976-09-08 Sumitomo Bakelite Co Kinzokuhakumakuhifukunetsukasoseijushifuirumunoseizohoho
JPS51115287A (en) * 1975-04-03 1976-10-09 Matsushita Electric Ind Co Ltd Method of preparing compound film
JPS5210869A (en) * 1975-07-15 1977-01-27 Toshinori Takagi Thin film forming method
JPS52103978A (en) * 1976-02-25 1977-08-31 Sharp Corp Manufacture of conduction body in semiconductor device
JPS53114786A (en) * 1977-03-18 1978-10-06 Toko Inc Method of manufacturing zinc oxide thin film
JPS5533919U (enrdf_load_stackoverflow) * 1978-08-23 1980-03-05
JPS55132535A (en) * 1979-04-02 1980-10-15 Sekisui Chem Co Ltd Manufacture of magnetic recording medium
JPS57195333A (en) * 1981-05-25 1982-12-01 Sekisui Chem Co Ltd Manufacture of magnetic recording medium
JPS60124918A (ja) * 1983-12-12 1985-07-04 Mitsubishi Electric Corp 薄膜蒸着装置
JPS6223103A (ja) * 1985-07-23 1987-01-31 Mitsubishi Electric Corp 薄膜付着装置
JP2008311231A (ja) * 2008-06-26 2008-12-25 Seiko Epson Corp 膜形成装置、電子装置の製造方法及び電気光学装置の製造方法

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50128688A (enrdf_load_stackoverflow) * 1974-03-29 1975-10-09
JPS50149591A (enrdf_load_stackoverflow) * 1974-05-22 1975-11-29
JPS5154143U (enrdf_load_stackoverflow) * 1974-10-21 1976-04-24
JPS51101735A (ja) * 1975-03-06 1976-09-08 Sumitomo Bakelite Co Kinzokuhakumakuhifukunetsukasoseijushifuirumunoseizohoho
JPS51115287A (en) * 1975-04-03 1976-10-09 Matsushita Electric Ind Co Ltd Method of preparing compound film
JPS5210869A (en) * 1975-07-15 1977-01-27 Toshinori Takagi Thin film forming method
JPS52103978A (en) * 1976-02-25 1977-08-31 Sharp Corp Manufacture of conduction body in semiconductor device
JPS53114786A (en) * 1977-03-18 1978-10-06 Toko Inc Method of manufacturing zinc oxide thin film
JPS5533919U (enrdf_load_stackoverflow) * 1978-08-23 1980-03-05
JPS55132535A (en) * 1979-04-02 1980-10-15 Sekisui Chem Co Ltd Manufacture of magnetic recording medium
JPS57195333A (en) * 1981-05-25 1982-12-01 Sekisui Chem Co Ltd Manufacture of magnetic recording medium
JPS60124918A (ja) * 1983-12-12 1985-07-04 Mitsubishi Electric Corp 薄膜蒸着装置
JPS6223103A (ja) * 1985-07-23 1987-01-31 Mitsubishi Electric Corp 薄膜付着装置
JP2008311231A (ja) * 2008-06-26 2008-12-25 Seiko Epson Corp 膜形成装置、電子装置の製造方法及び電気光学装置の製造方法

Also Published As

Publication number Publication date
JPS549592B2 (enrdf_load_stackoverflow) 1979-04-25

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