JPS53114786A - Method of manufacturing zinc oxide thin film - Google Patents
Method of manufacturing zinc oxide thin filmInfo
- Publication number
- JPS53114786A JPS53114786A JP2992277A JP2992277A JPS53114786A JP S53114786 A JPS53114786 A JP S53114786A JP 2992277 A JP2992277 A JP 2992277A JP 2992277 A JP2992277 A JP 2992277A JP S53114786 A JPS53114786 A JP S53114786A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- zinc oxide
- oxide thin
- manufacturing zinc
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2992277A JPS53114786A (en) | 1977-03-18 | 1977-03-18 | Method of manufacturing zinc oxide thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2992277A JPS53114786A (en) | 1977-03-18 | 1977-03-18 | Method of manufacturing zinc oxide thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53114786A true JPS53114786A (en) | 1978-10-06 |
Family
ID=12289475
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2992277A Pending JPS53114786A (en) | 1977-03-18 | 1977-03-18 | Method of manufacturing zinc oxide thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53114786A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5562567U (en) * | 1978-10-20 | 1980-04-28 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4933890A (en) * | 1972-07-29 | 1974-03-28 | ||
JPS5322878A (en) * | 1976-08-13 | 1978-03-02 | Akai Electric | Vacuum evaporation apparatus |
-
1977
- 1977-03-18 JP JP2992277A patent/JPS53114786A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4933890A (en) * | 1972-07-29 | 1974-03-28 | ||
JPS5322878A (en) * | 1976-08-13 | 1978-03-02 | Akai Electric | Vacuum evaporation apparatus |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5562567U (en) * | 1978-10-20 | 1980-04-28 |
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