JPS53114786A - Method of manufacturing zinc oxide thin film - Google Patents

Method of manufacturing zinc oxide thin film

Info

Publication number
JPS53114786A
JPS53114786A JP2992277A JP2992277A JPS53114786A JP S53114786 A JPS53114786 A JP S53114786A JP 2992277 A JP2992277 A JP 2992277A JP 2992277 A JP2992277 A JP 2992277A JP S53114786 A JPS53114786 A JP S53114786A
Authority
JP
Japan
Prior art keywords
thin film
zinc oxide
oxide thin
manufacturing zinc
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2992277A
Other languages
Japanese (ja)
Inventor
Toshinori Takagi
Kakuei Matsubara
Kaori Yamanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toko Inc
Original Assignee
Toko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toko Inc filed Critical Toko Inc
Priority to JP2992277A priority Critical patent/JPS53114786A/en
Publication of JPS53114786A publication Critical patent/JPS53114786A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP2992277A 1977-03-18 1977-03-18 Method of manufacturing zinc oxide thin film Pending JPS53114786A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2992277A JPS53114786A (en) 1977-03-18 1977-03-18 Method of manufacturing zinc oxide thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2992277A JPS53114786A (en) 1977-03-18 1977-03-18 Method of manufacturing zinc oxide thin film

Publications (1)

Publication Number Publication Date
JPS53114786A true JPS53114786A (en) 1978-10-06

Family

ID=12289475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2992277A Pending JPS53114786A (en) 1977-03-18 1977-03-18 Method of manufacturing zinc oxide thin film

Country Status (1)

Country Link
JP (1) JPS53114786A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562567U (en) * 1978-10-20 1980-04-28

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933890A (en) * 1972-07-29 1974-03-28
JPS5322878A (en) * 1976-08-13 1978-03-02 Akai Electric Vacuum evaporation apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933890A (en) * 1972-07-29 1974-03-28
JPS5322878A (en) * 1976-08-13 1978-03-02 Akai Electric Vacuum evaporation apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562567U (en) * 1978-10-20 1980-04-28

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