JPS5421995A - Method of making zinc oxide thin layer - Google Patents

Method of making zinc oxide thin layer

Info

Publication number
JPS5421995A
JPS5421995A JP8694777A JP8694777A JPS5421995A JP S5421995 A JPS5421995 A JP S5421995A JP 8694777 A JP8694777 A JP 8694777A JP 8694777 A JP8694777 A JP 8694777A JP S5421995 A JPS5421995 A JP S5421995A
Authority
JP
Japan
Prior art keywords
zinc oxide
thin layer
oxide thin
making zinc
making
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8694777A
Other languages
Japanese (ja)
Other versions
JPS5723644B2 (en
Inventor
Toshinori Takagi
Toshiki Mizoguchi
Mitsuo Sakakura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toko Inc
Original Assignee
Toko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toko Inc filed Critical Toko Inc
Priority to JP8694777A priority Critical patent/JPS5421995A/en
Publication of JPS5421995A publication Critical patent/JPS5421995A/en
Publication of JPS5723644B2 publication Critical patent/JPS5723644B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
JP8694777A 1977-07-20 1977-07-20 Method of making zinc oxide thin layer Granted JPS5421995A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8694777A JPS5421995A (en) 1977-07-20 1977-07-20 Method of making zinc oxide thin layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8694777A JPS5421995A (en) 1977-07-20 1977-07-20 Method of making zinc oxide thin layer

Publications (2)

Publication Number Publication Date
JPS5421995A true JPS5421995A (en) 1979-02-19
JPS5723644B2 JPS5723644B2 (en) 1982-05-19

Family

ID=13901053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8694777A Granted JPS5421995A (en) 1977-07-20 1977-07-20 Method of making zinc oxide thin layer

Country Status (1)

Country Link
JP (1) JPS5421995A (en)

Also Published As

Publication number Publication date
JPS5723644B2 (en) 1982-05-19

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