JPS53114099A - Piezooelectric crystal film of zinc oxide - Google Patents
Piezooelectric crystal film of zinc oxideInfo
- Publication number
- JPS53114099A JPS53114099A JP2949877A JP2949877A JPS53114099A JP S53114099 A JPS53114099 A JP S53114099A JP 2949877 A JP2949877 A JP 2949877A JP 2949877 A JP2949877 A JP 2949877A JP S53114099 A JPS53114099 A JP S53114099A
- Authority
- JP
- Japan
- Prior art keywords
- piezooelectric
- zinc oxide
- crystal film
- crystal
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2949877A JPS53114099A (en) | 1977-03-16 | 1977-03-16 | Piezooelectric crystal film of zinc oxide |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2949877A JPS53114099A (en) | 1977-03-16 | 1977-03-16 | Piezooelectric crystal film of zinc oxide |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53114099A true JPS53114099A (en) | 1978-10-05 |
JPS571155B2 JPS571155B2 (en) | 1982-01-09 |
Family
ID=12277732
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2949877A Granted JPS53114099A (en) | 1977-03-16 | 1977-03-16 | Piezooelectric crystal film of zinc oxide |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53114099A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009263709A (en) * | 2008-04-24 | 2009-11-12 | Hitachi Ltd | Sputtering target for depositing zinc oxide thin film, and display device and solar cell having zinc oxide thin film obtained by using the target, |
-
1977
- 1977-03-16 JP JP2949877A patent/JPS53114099A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009263709A (en) * | 2008-04-24 | 2009-11-12 | Hitachi Ltd | Sputtering target for depositing zinc oxide thin film, and display device and solar cell having zinc oxide thin film obtained by using the target, |
Also Published As
Publication number | Publication date |
---|---|
JPS571155B2 (en) | 1982-01-09 |
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