JPS53114099A - Piezooelectric crystal film of zinc oxide - Google Patents

Piezooelectric crystal film of zinc oxide

Info

Publication number
JPS53114099A
JPS53114099A JP2949877A JP2949877A JPS53114099A JP S53114099 A JPS53114099 A JP S53114099A JP 2949877 A JP2949877 A JP 2949877A JP 2949877 A JP2949877 A JP 2949877A JP S53114099 A JPS53114099 A JP S53114099A
Authority
JP
Japan
Prior art keywords
piezooelectric
zinc oxide
crystal film
crystal
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2949877A
Other languages
Japanese (ja)
Other versions
JPS571155B2 (en
Inventor
Toshio Ogawa
Tasuku Masuo
Kouji Nishiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2949877A priority Critical patent/JPS53114099A/en
Publication of JPS53114099A publication Critical patent/JPS53114099A/en
Publication of JPS571155B2 publication Critical patent/JPS571155B2/ja
Granted legal-status Critical Current

Links

JP2949877A 1977-03-16 1977-03-16 Piezooelectric crystal film of zinc oxide Granted JPS53114099A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2949877A JPS53114099A (en) 1977-03-16 1977-03-16 Piezooelectric crystal film of zinc oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2949877A JPS53114099A (en) 1977-03-16 1977-03-16 Piezooelectric crystal film of zinc oxide

Publications (2)

Publication Number Publication Date
JPS53114099A true JPS53114099A (en) 1978-10-05
JPS571155B2 JPS571155B2 (en) 1982-01-09

Family

ID=12277732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2949877A Granted JPS53114099A (en) 1977-03-16 1977-03-16 Piezooelectric crystal film of zinc oxide

Country Status (1)

Country Link
JP (1) JPS53114099A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009263709A (en) * 2008-04-24 2009-11-12 Hitachi Ltd Sputtering target for depositing zinc oxide thin film, and display device and solar cell having zinc oxide thin film obtained by using the target,

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009263709A (en) * 2008-04-24 2009-11-12 Hitachi Ltd Sputtering target for depositing zinc oxide thin film, and display device and solar cell having zinc oxide thin film obtained by using the target,

Also Published As

Publication number Publication date
JPS571155B2 (en) 1982-01-09

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