JPS5429100A - Piezoelectric crystal film of zinc oxide - Google Patents

Piezoelectric crystal film of zinc oxide

Info

Publication number
JPS5429100A
JPS5429100A JP9541277A JP9541277A JPS5429100A JP S5429100 A JPS5429100 A JP S5429100A JP 9541277 A JP9541277 A JP 9541277A JP 9541277 A JP9541277 A JP 9541277A JP S5429100 A JPS5429100 A JP S5429100A
Authority
JP
Japan
Prior art keywords
zinc oxide
crystal film
piezoelectric crystal
piezoelectric
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9541277A
Other languages
Japanese (ja)
Other versions
JPS5830751B2 (en
Inventor
Toshio Ogawa
Tasuku Masuo
Kouji Nishiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP52095412A priority Critical patent/JPS5830751B2/en
Publication of JPS5429100A publication Critical patent/JPS5429100A/en
Publication of JPS5830751B2 publication Critical patent/JPS5830751B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP52095412A 1977-08-08 1977-08-08 Zinc oxide piezoelectric crystal film Expired JPS5830751B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52095412A JPS5830751B2 (en) 1977-08-08 1977-08-08 Zinc oxide piezoelectric crystal film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52095412A JPS5830751B2 (en) 1977-08-08 1977-08-08 Zinc oxide piezoelectric crystal film

Publications (2)

Publication Number Publication Date
JPS5429100A true JPS5429100A (en) 1979-03-03
JPS5830751B2 JPS5830751B2 (en) 1983-07-01

Family

ID=14136954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52095412A Expired JPS5830751B2 (en) 1977-08-08 1977-08-08 Zinc oxide piezoelectric crystal film

Country Status (1)

Country Link
JP (1) JPS5830751B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104217787A (en) * 2013-05-29 2014-12-17 海洋王照明科技股份有限公司 Conductive diaphragm, preparation method and application thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104217787A (en) * 2013-05-29 2014-12-17 海洋王照明科技股份有限公司 Conductive diaphragm, preparation method and application thereof

Also Published As

Publication number Publication date
JPS5830751B2 (en) 1983-07-01

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