JPS50149591A - - Google Patents

Info

Publication number
JPS50149591A
JPS50149591A JP5826774A JP5826774A JPS50149591A JP S50149591 A JPS50149591 A JP S50149591A JP 5826774 A JP5826774 A JP 5826774A JP 5826774 A JP5826774 A JP 5826774A JP S50149591 A JPS50149591 A JP S50149591A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5826774A
Other languages
Japanese (ja)
Other versions
JPS571586B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5826774A priority Critical patent/JPS571586B2/ja
Publication of JPS50149591A publication Critical patent/JPS50149591A/ja
Publication of JPS571586B2 publication Critical patent/JPS571586B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5826774A 1974-05-22 1974-05-22 Expired JPS571586B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5826774A JPS571586B2 (enrdf_load_stackoverflow) 1974-05-22 1974-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5826774A JPS571586B2 (enrdf_load_stackoverflow) 1974-05-22 1974-05-22

Publications (2)

Publication Number Publication Date
JPS50149591A true JPS50149591A (enrdf_load_stackoverflow) 1975-11-29
JPS571586B2 JPS571586B2 (enrdf_load_stackoverflow) 1982-01-12

Family

ID=13079380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5826774A Expired JPS571586B2 (enrdf_load_stackoverflow) 1974-05-22 1974-05-22

Country Status (1)

Country Link
JP (1) JPS571586B2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017014278A1 (ja) * 2015-07-21 2017-01-26 住友重機械工業株式会社 成膜装置
JP2017025407A (ja) * 2015-07-21 2017-02-02 住友重機械工業株式会社 成膜装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933890A (enrdf_load_stackoverflow) * 1972-07-29 1974-03-28
JPS5062181A (enrdf_load_stackoverflow) * 1973-10-05 1975-05-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933890A (enrdf_load_stackoverflow) * 1972-07-29 1974-03-28
JPS5062181A (enrdf_load_stackoverflow) * 1973-10-05 1975-05-28

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017014278A1 (ja) * 2015-07-21 2017-01-26 住友重機械工業株式会社 成膜装置
JP2017025407A (ja) * 2015-07-21 2017-02-02 住友重機械工業株式会社 成膜装置
CN107849690A (zh) * 2015-07-21 2018-03-27 住友重机械工业株式会社 成膜装置
KR20180034463A (ko) * 2015-07-21 2018-04-04 스미도모쥬기가이고교 가부시키가이샤 성막장치
KR20200032276A (ko) * 2015-07-21 2020-03-25 스미도모쥬기가이고교 가부시키가이샤 음이온생성장치
KR20230129601A (ko) * 2015-07-21 2023-09-08 스미도모쥬기가이고교 가부시키가이샤 음이온생성장치

Also Published As

Publication number Publication date
JPS571586B2 (enrdf_load_stackoverflow) 1982-01-12

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