JPS571586B2 - - Google Patents

Info

Publication number
JPS571586B2
JPS571586B2 JP5826774A JP5826774A JPS571586B2 JP S571586 B2 JPS571586 B2 JP S571586B2 JP 5826774 A JP5826774 A JP 5826774A JP 5826774 A JP5826774 A JP 5826774A JP S571586 B2 JPS571586 B2 JP S571586B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5826774A
Other languages
Japanese (ja)
Other versions
JPS50149591A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5826774A priority Critical patent/JPS571586B2/ja
Publication of JPS50149591A publication Critical patent/JPS50149591A/ja
Publication of JPS571586B2 publication Critical patent/JPS571586B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5826774A 1974-05-22 1974-05-22 Expired JPS571586B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5826774A JPS571586B2 (enrdf_load_stackoverflow) 1974-05-22 1974-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5826774A JPS571586B2 (enrdf_load_stackoverflow) 1974-05-22 1974-05-22

Publications (2)

Publication Number Publication Date
JPS50149591A JPS50149591A (enrdf_load_stackoverflow) 1975-11-29
JPS571586B2 true JPS571586B2 (enrdf_load_stackoverflow) 1982-01-12

Family

ID=13079380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5826774A Expired JPS571586B2 (enrdf_load_stackoverflow) 1974-05-22 1974-05-22

Country Status (1)

Country Link
JP (1) JPS571586B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6584982B2 (ja) * 2015-07-21 2019-10-02 住友重機械工業株式会社 成膜装置
KR102690725B1 (ko) * 2015-07-21 2024-07-31 스미도모쥬기가이고교 가부시키가이샤 음이온생성장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS549592B2 (enrdf_load_stackoverflow) * 1972-07-29 1979-04-25
JPS5062181A (enrdf_load_stackoverflow) * 1973-10-05 1975-05-28

Also Published As

Publication number Publication date
JPS50149591A (enrdf_load_stackoverflow) 1975-11-29

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