JPS5847871B2 - ハンドウタイソウチ ノ セイホウ - Google Patents
ハンドウタイソウチ ノ セイホウInfo
- Publication number
- JPS5847871B2 JPS5847871B2 JP12011572A JP12011572A JPS5847871B2 JP S5847871 B2 JPS5847871 B2 JP S5847871B2 JP 12011572 A JP12011572 A JP 12011572A JP 12011572 A JP12011572 A JP 12011572A JP S5847871 B2 JPS5847871 B2 JP S5847871B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- regions
- insulating layer
- impurity
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012535 impurity Substances 0.000 claims description 38
- 239000004065 semiconductor Substances 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 14
- 238000009792 diffusion process Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 description 9
- 238000001259 photo etching Methods 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12011572A JPS5847871B2 (ja) | 1972-11-30 | 1972-11-30 | ハンドウタイソウチ ノ セイホウ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12011572A JPS5847871B2 (ja) | 1972-11-30 | 1972-11-30 | ハンドウタイソウチ ノ セイホウ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4978488A JPS4978488A (enrdf_load_html_response) | 1974-07-29 |
| JPS5847871B2 true JPS5847871B2 (ja) | 1983-10-25 |
Family
ID=14778304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12011572A Expired JPS5847871B2 (ja) | 1972-11-30 | 1972-11-30 | ハンドウタイソウチ ノ セイホウ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5847871B2 (enrdf_load_html_response) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51120683A (en) * | 1975-04-16 | 1976-10-22 | Agency Of Ind Science & Technol | Field-effect transistor and its fabrication |
-
1972
- 1972-11-30 JP JP12011572A patent/JPS5847871B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4978488A (enrdf_load_html_response) | 1974-07-29 |
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