JPS584143A - ポジ・レジスト膜の現像方法 - Google Patents

ポジ・レジスト膜の現像方法

Info

Publication number
JPS584143A
JPS584143A JP10187881A JP10187881A JPS584143A JP S584143 A JPS584143 A JP S584143A JP 10187881 A JP10187881 A JP 10187881A JP 10187881 A JP10187881 A JP 10187881A JP S584143 A JPS584143 A JP S584143A
Authority
JP
Japan
Prior art keywords
positive resist
development
resist film
electric field
developer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10187881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6360897B2 (enExample
Inventor
Takaaki Momose
百瀬　孝昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10187881A priority Critical patent/JPS584143A/ja
Publication of JPS584143A publication Critical patent/JPS584143A/ja
Publication of JPS6360897B2 publication Critical patent/JPS6360897B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3007—Imagewise removal using liquid means combined with electrical means, e.g. force fields

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP10187881A 1981-06-30 1981-06-30 ポジ・レジスト膜の現像方法 Granted JPS584143A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10187881A JPS584143A (ja) 1981-06-30 1981-06-30 ポジ・レジスト膜の現像方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10187881A JPS584143A (ja) 1981-06-30 1981-06-30 ポジ・レジスト膜の現像方法

Publications (2)

Publication Number Publication Date
JPS584143A true JPS584143A (ja) 1983-01-11
JPS6360897B2 JPS6360897B2 (enExample) 1988-11-25

Family

ID=14312205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10187881A Granted JPS584143A (ja) 1981-06-30 1981-06-30 ポジ・レジスト膜の現像方法

Country Status (1)

Country Link
JP (1) JPS584143A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5842042A (ja) * 1981-08-28 1983-03-11 ヘキスト・アクチエンゲゼルシヤフト 露光した感光性複写層の現像法
JPS6120043A (ja) * 1984-07-09 1986-01-28 Sigma Gijutsu Kogyo Kk 現像の終点検出方法
JPS61167947A (ja) * 1985-01-21 1986-07-29 Sigma Gijutsu Kogyo Kk 現像の終点検出方法
JPS61171244U (enExample) * 1985-04-12 1986-10-24
JPS6238457A (ja) * 1985-08-14 1987-02-19 Asahi Chem Ind Co Ltd レジスト現像方法
JPS62135838A (ja) * 1985-08-19 1987-06-18 Toshiba Corp パタ−ン形成方法及び装置
JPH0220876A (ja) * 1988-07-08 1990-01-24 Matsushita Electric Ind Co Ltd 現像方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5842042A (ja) * 1981-08-28 1983-03-11 ヘキスト・アクチエンゲゼルシヤフト 露光した感光性複写層の現像法
JPS6120043A (ja) * 1984-07-09 1986-01-28 Sigma Gijutsu Kogyo Kk 現像の終点検出方法
JPS61167947A (ja) * 1985-01-21 1986-07-29 Sigma Gijutsu Kogyo Kk 現像の終点検出方法
JPS61171244U (enExample) * 1985-04-12 1986-10-24
JPS6238457A (ja) * 1985-08-14 1987-02-19 Asahi Chem Ind Co Ltd レジスト現像方法
JPS62135838A (ja) * 1985-08-19 1987-06-18 Toshiba Corp パタ−ン形成方法及び装置
JPH0220876A (ja) * 1988-07-08 1990-01-24 Matsushita Electric Ind Co Ltd 現像方法

Also Published As

Publication number Publication date
JPS6360897B2 (enExample) 1988-11-25

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