JPS5833705Y2 - 吸着固定装置 - Google Patents
吸着固定装置Info
- Publication number
- JPS5833705Y2 JPS5833705Y2 JP7102580U JP7102580U JPS5833705Y2 JP S5833705 Y2 JPS5833705 Y2 JP S5833705Y2 JP 7102580 U JP7102580 U JP 7102580U JP 7102580 U JP7102580 U JP 7102580U JP S5833705 Y2 JPS5833705 Y2 JP S5833705Y2
- Authority
- JP
- Japan
- Prior art keywords
- suction
- outer edge
- porosity
- layers
- adsorption
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001179 sorption measurement Methods 0.000 title claims description 20
- 229910010272 inorganic material Inorganic materials 0.000 claims description 9
- 239000011147 inorganic material Substances 0.000 claims description 9
- 239000011148 porous material Substances 0.000 claims description 7
- 239000006061 abrasive grain Substances 0.000 claims description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 5
- 238000005245 sintering Methods 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims description 3
- 238000000465 moulding Methods 0.000 claims description 2
- 238000005498 polishing Methods 0.000 description 18
- 238000004140 cleaning Methods 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 239000011362 coarse particle Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- -1 for example Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 231100000989 no adverse effect Toxicity 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7102580U JPS5833705Y2 (ja) | 1980-05-23 | 1980-05-23 | 吸着固定装置 |
| US06/265,318 US4521995A (en) | 1980-05-23 | 1981-05-20 | Wafer attracting and fixing device |
| DE3120477A DE3120477C2 (de) | 1980-05-23 | 1981-05-22 | Verfahren und Vorrichtung zum Aufspannen von Halbleiterplättchen |
| US06/708,626 US4625463A (en) | 1980-05-23 | 1985-03-06 | Wafer attracting and fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7102580U JPS5833705Y2 (ja) | 1980-05-23 | 1980-05-23 | 吸着固定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56172941U JPS56172941U (enExample) | 1981-12-21 |
| JPS5833705Y2 true JPS5833705Y2 (ja) | 1983-07-28 |
Family
ID=29664850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7102580U Expired JPS5833705Y2 (ja) | 1980-05-23 | 1980-05-23 | 吸着固定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5833705Y2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS594045A (ja) * | 1982-06-30 | 1984-01-10 | Fujitsu Ltd | 真空吸着固定手段 |
| KR100189970B1 (ko) * | 1995-08-07 | 1999-06-01 | 윤종용 | 웨이퍼 연마장치 |
| DE10260233B4 (de) | 2002-12-20 | 2016-05-19 | Infineon Technologies Ag | Verfahren zum Befestigen eines Werkstücks mit einem Feststoff an einem Werkstückträger und Werkstückträger |
-
1980
- 1980-05-23 JP JP7102580U patent/JPS5833705Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56172941U (enExample) | 1981-12-21 |
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