JPS56172941U - - Google Patents
Info
- Publication number
- JPS56172941U JPS56172941U JP7102580U JP7102580U JPS56172941U JP S56172941 U JPS56172941 U JP S56172941U JP 7102580 U JP7102580 U JP 7102580U JP 7102580 U JP7102580 U JP 7102580U JP S56172941 U JPS56172941 U JP S56172941U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7102580U JPS5833705Y2 (ja) | 1980-05-23 | 1980-05-23 | 吸着固定装置 |
| US06/265,318 US4521995A (en) | 1980-05-23 | 1981-05-20 | Wafer attracting and fixing device |
| DE3120477A DE3120477C2 (de) | 1980-05-23 | 1981-05-22 | Verfahren und Vorrichtung zum Aufspannen von Halbleiterplättchen |
| US06/708,626 US4625463A (en) | 1980-05-23 | 1985-03-06 | Wafer attracting and fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7102580U JPS5833705Y2 (ja) | 1980-05-23 | 1980-05-23 | 吸着固定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56172941U true JPS56172941U (enExample) | 1981-12-21 |
| JPS5833705Y2 JPS5833705Y2 (ja) | 1983-07-28 |
Family
ID=29664850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7102580U Expired JPS5833705Y2 (ja) | 1980-05-23 | 1980-05-23 | 吸着固定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5833705Y2 (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS594045A (ja) * | 1982-06-30 | 1984-01-10 | Fujitsu Ltd | 真空吸着固定手段 |
| JPH0950975A (ja) * | 1995-08-07 | 1997-02-18 | Samsung Electron Co Ltd | ウェーハ研磨装置 |
| US7708854B2 (en) | 2002-12-20 | 2010-05-04 | Infineon Technologies Ag | Work carrier and method of processing a workpiece |
-
1980
- 1980-05-23 JP JP7102580U patent/JPS5833705Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS594045A (ja) * | 1982-06-30 | 1984-01-10 | Fujitsu Ltd | 真空吸着固定手段 |
| JPH0950975A (ja) * | 1995-08-07 | 1997-02-18 | Samsung Electron Co Ltd | ウェーハ研磨装置 |
| US7708854B2 (en) | 2002-12-20 | 2010-05-04 | Infineon Technologies Ag | Work carrier and method of processing a workpiece |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5833705Y2 (ja) | 1983-07-28 |