JPS5832234A - 磁気記録媒体の製造方法 - Google Patents
磁気記録媒体の製造方法Info
- Publication number
- JPS5832234A JPS5832234A JP13117681A JP13117681A JPS5832234A JP S5832234 A JPS5832234 A JP S5832234A JP 13117681 A JP13117681 A JP 13117681A JP 13117681 A JP13117681 A JP 13117681A JP S5832234 A JPS5832234 A JP S5832234A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- incident angle
- room
- mask
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 14
- 238000004519 manufacturing process Methods 0.000 title claims description 3
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 238000001704 evaporation Methods 0.000 claims abstract description 10
- 238000001816 cooling Methods 0.000 claims abstract description 4
- 239000003302 ferromagnetic material Substances 0.000 claims abstract 3
- 238000007740 vapor deposition Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims 2
- 229920000642 polymer Polymers 0.000 claims 1
- 230000008020 evaporation Effects 0.000 abstract description 9
- 230000008859 change Effects 0.000 abstract description 4
- 238000000151 deposition Methods 0.000 abstract description 2
- 238000005192 partition Methods 0.000 abstract description 2
- 238000005507 spraying Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000005294 ferromagnetic effect Effects 0.000 description 3
- -1 iron or alloys Chemical class 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 229910020517 Co—Ti Inorganic materials 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/85—Coating a support with a magnetic layer by vapour deposition
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13117681A JPS5832234A (ja) | 1981-08-20 | 1981-08-20 | 磁気記録媒体の製造方法 |
| US06/409,608 US4450186A (en) | 1981-08-20 | 1982-08-19 | Method and device for manufacturing magnetic recording medium |
| DE8282107650T DE3278257D1 (en) | 1981-08-20 | 1982-08-20 | Method and device for manufacturing magnetic recording medium |
| DE198282107650T DE73041T1 (de) | 1981-08-20 | 1982-08-20 | Verfahren und einrichtung zur herstelling von magnetischen aufzeichnungstraegern. |
| EP82107650A EP0073041B1 (en) | 1981-08-20 | 1982-08-20 | Method and device for manufacturing magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13117681A JPS5832234A (ja) | 1981-08-20 | 1981-08-20 | 磁気記録媒体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5832234A true JPS5832234A (ja) | 1983-02-25 |
| JPH0330213B2 JPH0330213B2 (enrdf_load_stackoverflow) | 1991-04-26 |
Family
ID=15051776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13117681A Granted JPS5832234A (ja) | 1981-08-20 | 1981-08-20 | 磁気記録媒体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5832234A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5841443A (ja) * | 1981-09-04 | 1983-03-10 | Fuji Photo Film Co Ltd | 磁気記録媒体の製法 |
| JPS59124035A (ja) * | 1982-12-30 | 1984-07-18 | Hitachi Maxell Ltd | 磁気記録媒体の製造方法 |
| JPS60157728A (ja) * | 1984-01-26 | 1985-08-19 | Hitachi Maxell Ltd | 磁気記録媒体の製造方法 |
| JPS61250836A (ja) * | 1985-04-29 | 1986-11-07 | Sony Corp | 磁気記録媒体の製造方法 |
| CN113151787A (zh) * | 2016-07-05 | 2021-07-23 | 佳能特机株式会社 | 蒸镀装置及蒸发源 |
-
1981
- 1981-08-20 JP JP13117681A patent/JPS5832234A/ja active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5841443A (ja) * | 1981-09-04 | 1983-03-10 | Fuji Photo Film Co Ltd | 磁気記録媒体の製法 |
| JPS59124035A (ja) * | 1982-12-30 | 1984-07-18 | Hitachi Maxell Ltd | 磁気記録媒体の製造方法 |
| JPS60157728A (ja) * | 1984-01-26 | 1985-08-19 | Hitachi Maxell Ltd | 磁気記録媒体の製造方法 |
| JPS61250836A (ja) * | 1985-04-29 | 1986-11-07 | Sony Corp | 磁気記録媒体の製造方法 |
| CN113151787A (zh) * | 2016-07-05 | 2021-07-23 | 佳能特机株式会社 | 蒸镀装置及蒸发源 |
| CN113151787B (zh) * | 2016-07-05 | 2023-05-23 | 佳能特机株式会社 | 蒸镀装置及蒸发源 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0330213B2 (enrdf_load_stackoverflow) | 1991-04-26 |
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