JPS5830005A - 透明電導膜の製造方法 - Google Patents

透明電導膜の製造方法

Info

Publication number
JPS5830005A
JPS5830005A JP12922781A JP12922781A JPS5830005A JP S5830005 A JPS5830005 A JP S5830005A JP 12922781 A JP12922781 A JP 12922781A JP 12922781 A JP12922781 A JP 12922781A JP S5830005 A JPS5830005 A JP S5830005A
Authority
JP
Japan
Prior art keywords
gas
transparent conductive
conductive film
antimony
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12922781A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0370325B2 (OSRAM
Inventor
桑野　幸徳
中野　昭一
松岡　継文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Sanyo Denki Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Sanyo Denki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd, Sanyo Denki Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP12922781A priority Critical patent/JPS5830005A/ja
Publication of JPS5830005A publication Critical patent/JPS5830005A/ja
Publication of JPH0370325B2 publication Critical patent/JPH0370325B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Electric Cables (AREA)
JP12922781A 1981-08-17 1981-08-17 透明電導膜の製造方法 Granted JPS5830005A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12922781A JPS5830005A (ja) 1981-08-17 1981-08-17 透明電導膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12922781A JPS5830005A (ja) 1981-08-17 1981-08-17 透明電導膜の製造方法

Publications (2)

Publication Number Publication Date
JPS5830005A true JPS5830005A (ja) 1983-02-22
JPH0370325B2 JPH0370325B2 (OSRAM) 1991-11-07

Family

ID=15004295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12922781A Granted JPS5830005A (ja) 1981-08-17 1981-08-17 透明電導膜の製造方法

Country Status (1)

Country Link
JP (1) JPS5830005A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6139321A (ja) * 1984-07-30 1986-02-25 株式会社半導体エネルギー研究所 酸化スズ導電膜の作製方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5061695A (OSRAM) * 1973-10-02 1975-05-27
JPS5167994A (ja) * 1974-12-09 1976-06-12 Sharp Kk Handotaimakuseizosochi
JPS5651805A (en) * 1979-10-03 1981-05-09 Nippon Sheet Glass Co Ltd Method of forming conductive thin film
JPS5751153A (en) * 1980-08-22 1982-03-25 Westinghouse Electric Corp Formation of transparent electroconductive film

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5061695A (OSRAM) * 1973-10-02 1975-05-27
JPS5167994A (ja) * 1974-12-09 1976-06-12 Sharp Kk Handotaimakuseizosochi
JPS5651805A (en) * 1979-10-03 1981-05-09 Nippon Sheet Glass Co Ltd Method of forming conductive thin film
JPS5751153A (en) * 1980-08-22 1982-03-25 Westinghouse Electric Corp Formation of transparent electroconductive film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6139321A (ja) * 1984-07-30 1986-02-25 株式会社半導体エネルギー研究所 酸化スズ導電膜の作製方法

Also Published As

Publication number Publication date
JPH0370325B2 (OSRAM) 1991-11-07

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