JPS5821845A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS5821845A
JPS5821845A JP56121142A JP12114281A JPS5821845A JP S5821845 A JPS5821845 A JP S5821845A JP 56121142 A JP56121142 A JP 56121142A JP 12114281 A JP12114281 A JP 12114281A JP S5821845 A JPS5821845 A JP S5821845A
Authority
JP
Japan
Prior art keywords
film
wiring layer
semiconductor device
phosphorus
glass film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56121142A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6244854B2 (cg-RX-API-DMAC10.html
Inventor
Haruo Amano
天野　陽夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56121142A priority Critical patent/JPS5821845A/ja
Publication of JPS5821845A publication Critical patent/JPS5821845A/ja
Publication of JPS6244854B2 publication Critical patent/JPS6244854B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W20/069—

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP56121142A 1981-07-31 1981-07-31 半導体装置 Granted JPS5821845A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56121142A JPS5821845A (ja) 1981-07-31 1981-07-31 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56121142A JPS5821845A (ja) 1981-07-31 1981-07-31 半導体装置

Publications (2)

Publication Number Publication Date
JPS5821845A true JPS5821845A (ja) 1983-02-08
JPS6244854B2 JPS6244854B2 (cg-RX-API-DMAC10.html) 1987-09-22

Family

ID=14803894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56121142A Granted JPS5821845A (ja) 1981-07-31 1981-07-31 半導体装置

Country Status (1)

Country Link
JP (1) JPS5821845A (cg-RX-API-DMAC10.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54142981A (en) * 1978-04-27 1979-11-07 Matsushita Electric Ind Co Ltd Manufacture of insulation gate type semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54142981A (en) * 1978-04-27 1979-11-07 Matsushita Electric Ind Co Ltd Manufacture of insulation gate type semiconductor device

Also Published As

Publication number Publication date
JPS6244854B2 (cg-RX-API-DMAC10.html) 1987-09-22

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