JPS5821826A - 半導体製造装置の堆積物除去方法 - Google Patents

半導体製造装置の堆積物除去方法

Info

Publication number
JPS5821826A
JPS5821826A JP56121116A JP12111681A JPS5821826A JP S5821826 A JPS5821826 A JP S5821826A JP 56121116 A JP56121116 A JP 56121116A JP 12111681 A JP12111681 A JP 12111681A JP S5821826 A JPS5821826 A JP S5821826A
Authority
JP
Japan
Prior art keywords
core tube
furnace core
deposits
film
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56121116A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6359533B2 (enExample
Inventor
Yasumasa Otsuki
大月　康正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP56121116A priority Critical patent/JPS5821826A/ja
Publication of JPS5821826A publication Critical patent/JPS5821826A/ja
Publication of JPS6359533B2 publication Critical patent/JPS6359533B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32394—Treating interior parts of workpieces

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
JP56121116A 1981-07-31 1981-07-31 半導体製造装置の堆積物除去方法 Granted JPS5821826A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56121116A JPS5821826A (ja) 1981-07-31 1981-07-31 半導体製造装置の堆積物除去方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56121116A JPS5821826A (ja) 1981-07-31 1981-07-31 半導体製造装置の堆積物除去方法

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP63078942A Division JPS63283031A (ja) 1988-03-31 1988-03-31 半導体製造装置
JP63078941A Division JPS63283030A (ja) 1988-03-31 1988-03-31 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS5821826A true JPS5821826A (ja) 1983-02-08
JPS6359533B2 JPS6359533B2 (enExample) 1988-11-21

Family

ID=14803275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56121116A Granted JPS5821826A (ja) 1981-07-31 1981-07-31 半導体製造装置の堆積物除去方法

Country Status (1)

Country Link
JP (1) JPS5821826A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4657616A (en) * 1985-05-17 1987-04-14 Benzing Technologies, Inc. In-situ CVD chamber cleaner
JPS62237720A (ja) * 1986-04-08 1987-10-17 Agency Of Ind Science & Technol 分子線結晶成長装置
JPS63283031A (ja) * 1988-03-31 1988-11-18 Seiko Epson Corp 半導体製造装置
JPS63283030A (ja) * 1988-03-31 1988-11-18 Seiko Epson Corp 半導体製造装置
US4786352A (en) * 1986-09-12 1988-11-22 Benzing Technologies, Inc. Apparatus for in-situ chamber cleaning
CN117265502A (zh) * 2023-09-22 2023-12-22 安徽旭合新能源科技有限公司 一种cvd镀膜炉管和炉壁薄膜的清除方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50118977A (enExample) * 1974-03-02 1975-09-18
JPS5358490A (en) * 1976-11-05 1978-05-26 Mitsubishi Electric Corp Forming method for film
JPS5486968A (en) * 1977-12-23 1979-07-10 Hitachi Ltd Washing
JPS55138237A (en) * 1979-04-13 1980-10-28 Fujitsu Ltd Manufacture of semiconductor device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50118977A (enExample) * 1974-03-02 1975-09-18
JPS5358490A (en) * 1976-11-05 1978-05-26 Mitsubishi Electric Corp Forming method for film
JPS5486968A (en) * 1977-12-23 1979-07-10 Hitachi Ltd Washing
JPS55138237A (en) * 1979-04-13 1980-10-28 Fujitsu Ltd Manufacture of semiconductor device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4657616A (en) * 1985-05-17 1987-04-14 Benzing Technologies, Inc. In-situ CVD chamber cleaner
JPS62237720A (ja) * 1986-04-08 1987-10-17 Agency Of Ind Science & Technol 分子線結晶成長装置
US4786352A (en) * 1986-09-12 1988-11-22 Benzing Technologies, Inc. Apparatus for in-situ chamber cleaning
JPS63283031A (ja) * 1988-03-31 1988-11-18 Seiko Epson Corp 半導体製造装置
JPS63283030A (ja) * 1988-03-31 1988-11-18 Seiko Epson Corp 半導体製造装置
CN117265502A (zh) * 2023-09-22 2023-12-22 安徽旭合新能源科技有限公司 一种cvd镀膜炉管和炉壁薄膜的清除方法
CN117265502B (zh) * 2023-09-22 2024-04-26 安徽旭合新能源科技有限公司 一种cvd镀膜炉管和炉壁薄膜的清除方法

Also Published As

Publication number Publication date
JPS6359533B2 (enExample) 1988-11-21

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