JPS5821652Y2 - 研摩装置 - Google Patents

研摩装置

Info

Publication number
JPS5821652Y2
JPS5821652Y2 JP1978117891U JP11789178U JPS5821652Y2 JP S5821652 Y2 JPS5821652 Y2 JP S5821652Y2 JP 1978117891 U JP1978117891 U JP 1978117891U JP 11789178 U JP11789178 U JP 11789178U JP S5821652 Y2 JPS5821652 Y2 JP S5821652Y2
Authority
JP
Japan
Prior art keywords
polished
surface plate
push rod
plate
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978117891U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5537141U (enrdf_load_stackoverflow
Inventor
永野優治
江口実
酒井靖雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1978117891U priority Critical patent/JPS5821652Y2/ja
Publication of JPS5537141U publication Critical patent/JPS5537141U/ja
Application granted granted Critical
Publication of JPS5821652Y2 publication Critical patent/JPS5821652Y2/ja
Expired legal-status Critical Current

Links

JP1978117891U 1978-08-28 1978-08-28 研摩装置 Expired JPS5821652Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978117891U JPS5821652Y2 (ja) 1978-08-28 1978-08-28 研摩装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978117891U JPS5821652Y2 (ja) 1978-08-28 1978-08-28 研摩装置

Publications (2)

Publication Number Publication Date
JPS5537141U JPS5537141U (enrdf_load_stackoverflow) 1980-03-10
JPS5821652Y2 true JPS5821652Y2 (ja) 1983-05-09

Family

ID=29071740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978117891U Expired JPS5821652Y2 (ja) 1978-08-28 1978-08-28 研摩装置

Country Status (1)

Country Link
JP (1) JPS5821652Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5919257U (ja) * 1982-07-30 1984-02-06 ホ−ヤ株式会社 両面加工装置
JPS5924255U (ja) * 1982-08-05 1984-02-15 ホ−ヤ株式会社 両面加工装置
JPS5946664U (ja) * 1982-09-21 1984-03-28 ホ−ヤ株式会社 両面加工装置

Also Published As

Publication number Publication date
JPS5537141U (enrdf_load_stackoverflow) 1980-03-10

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