JPH0426983B2 - - Google Patents

Info

Publication number
JPH0426983B2
JPH0426983B2 JP59217242A JP21724284A JPH0426983B2 JP H0426983 B2 JPH0426983 B2 JP H0426983B2 JP 59217242 A JP59217242 A JP 59217242A JP 21724284 A JP21724284 A JP 21724284A JP H0426983 B2 JPH0426983 B2 JP H0426983B2
Authority
JP
Japan
Prior art keywords
carrier
workpiece
take
surface plates
sun gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59217242A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6195876A (ja
Inventor
Masaharu Kinoshita
Hideo Kawakami
Osamu Yoneya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Toshiba Corp
Shibaura Machine Co Ltd
Original Assignee
Toshiba Corp
Toshiba Machine Co Ltd
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Machine Co Ltd, Toshiba Ceramics Co Ltd filed Critical Toshiba Corp
Priority to JP59217242A priority Critical patent/JPS6195876A/ja
Publication of JPS6195876A publication Critical patent/JPS6195876A/ja
Publication of JPH0426983B2 publication Critical patent/JPH0426983B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP59217242A 1984-10-18 1984-10-18 研磨機におけるキヤリア位置決め方法 Granted JPS6195876A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59217242A JPS6195876A (ja) 1984-10-18 1984-10-18 研磨機におけるキヤリア位置決め方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59217242A JPS6195876A (ja) 1984-10-18 1984-10-18 研磨機におけるキヤリア位置決め方法

Publications (2)

Publication Number Publication Date
JPS6195876A JPS6195876A (ja) 1986-05-14
JPH0426983B2 true JPH0426983B2 (enrdf_load_stackoverflow) 1992-05-08

Family

ID=16701077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59217242A Granted JPS6195876A (ja) 1984-10-18 1984-10-18 研磨機におけるキヤリア位置決め方法

Country Status (1)

Country Link
JP (1) JPS6195876A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61219568A (ja) * 1985-03-25 1986-09-29 Mitsubishi Metal Corp 一定位置停止研磨方法及び装置
JPS6328562A (ja) * 1986-07-22 1988-02-06 Otani Reiji ラツピングキヤリヤの噛合い装填方法
JPH0413566A (ja) * 1990-05-08 1992-01-17 Showa Alum Corp 研磨装置
JPH05285828A (ja) * 1992-04-09 1993-11-02 Hitachi Zosen Corp 研磨装置
JP5379461B2 (ja) * 2008-12-10 2013-12-25 Ｈｏｙａ株式会社 マスクブランク用基板の製造方法、マスクブランクの製造方法、及びマスクの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58215031A (ja) * 1982-06-07 1983-12-14 Toshiba Corp ウエ−ハ取り出し方法
JPS59109447U (ja) * 1983-01-06 1984-07-24 ホ−ヤ株式会社 両面加工装置

Also Published As

Publication number Publication date
JPS6195876A (ja) 1986-05-14

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