JPS6195876A - 研磨機におけるキヤリア位置決め方法 - Google Patents

研磨機におけるキヤリア位置決め方法

Info

Publication number
JPS6195876A
JPS6195876A JP59217242A JP21724284A JPS6195876A JP S6195876 A JPS6195876 A JP S6195876A JP 59217242 A JP59217242 A JP 59217242A JP 21724284 A JP21724284 A JP 21724284A JP S6195876 A JPS6195876 A JP S6195876A
Authority
JP
Japan
Prior art keywords
carrier
workpiece
surface plates
sun gear
internal gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59217242A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0426983B2 (enrdf_load_stackoverflow
Inventor
Masaharu Kinoshita
正治 木下
Hideo Kawakami
川上　英雄
Osamu Yoneya
米屋　修
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Toshiba Corp
Shibaura Machine Co Ltd
Original Assignee
Toshiba Corp
Toshiba Machine Co Ltd
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Machine Co Ltd, Toshiba Ceramics Co Ltd filed Critical Toshiba Corp
Priority to JP59217242A priority Critical patent/JPS6195876A/ja
Publication of JPS6195876A publication Critical patent/JPS6195876A/ja
Publication of JPH0426983B2 publication Critical patent/JPH0426983B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP59217242A 1984-10-18 1984-10-18 研磨機におけるキヤリア位置決め方法 Granted JPS6195876A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59217242A JPS6195876A (ja) 1984-10-18 1984-10-18 研磨機におけるキヤリア位置決め方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59217242A JPS6195876A (ja) 1984-10-18 1984-10-18 研磨機におけるキヤリア位置決め方法

Publications (2)

Publication Number Publication Date
JPS6195876A true JPS6195876A (ja) 1986-05-14
JPH0426983B2 JPH0426983B2 (enrdf_load_stackoverflow) 1992-05-08

Family

ID=16701077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59217242A Granted JPS6195876A (ja) 1984-10-18 1984-10-18 研磨機におけるキヤリア位置決め方法

Country Status (1)

Country Link
JP (1) JPS6195876A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61219568A (ja) * 1985-03-25 1986-09-29 Mitsubishi Metal Corp 一定位置停止研磨方法及び装置
JPS6328562A (ja) * 1986-07-22 1988-02-06 Otani Reiji ラツピングキヤリヤの噛合い装填方法
JPH0413566A (ja) * 1990-05-08 1992-01-17 Showa Alum Corp 研磨装置
JPH05285828A (ja) * 1992-04-09 1993-11-02 Hitachi Zosen Corp 研磨装置
JP2010139588A (ja) * 2008-12-10 2010-06-24 Hoya Corp マスクブランク用基板の製造方法、マスクブランクの製造方法、及びマスクの製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58215031A (ja) * 1982-06-07 1983-12-14 Toshiba Corp ウエ−ハ取り出し方法
JPS59109447U (ja) * 1983-01-06 1984-07-24 ホ−ヤ株式会社 両面加工装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58215031A (ja) * 1982-06-07 1983-12-14 Toshiba Corp ウエ−ハ取り出し方法
JPS59109447U (ja) * 1983-01-06 1984-07-24 ホ−ヤ株式会社 両面加工装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61219568A (ja) * 1985-03-25 1986-09-29 Mitsubishi Metal Corp 一定位置停止研磨方法及び装置
JPS6328562A (ja) * 1986-07-22 1988-02-06 Otani Reiji ラツピングキヤリヤの噛合い装填方法
JPH0413566A (ja) * 1990-05-08 1992-01-17 Showa Alum Corp 研磨装置
JPH05285828A (ja) * 1992-04-09 1993-11-02 Hitachi Zosen Corp 研磨装置
JP2010139588A (ja) * 2008-12-10 2010-06-24 Hoya Corp マスクブランク用基板の製造方法、マスクブランクの製造方法、及びマスクの製造方法

Also Published As

Publication number Publication date
JPH0426983B2 (enrdf_load_stackoverflow) 1992-05-08

Similar Documents

Publication Publication Date Title
US5647789A (en) Polishing machine and a method of polishing a work
DE4031163C2 (enrdf_load_stackoverflow)
US5989105A (en) Method and apparatus for polishing chamfers of semiconductor wafers
JP5493633B2 (ja) 研磨方法及びその装置
CN109755167A (zh) 一种用于全自动半导体封装设备的条带翻转装置
JPS63169209A (ja) 自動バリ取り装置
JPS6195876A (ja) 研磨機におけるキヤリア位置決め方法
JPH11267964A (ja) 平面研磨装置及びそれに用いるキャリヤ
CN116110845A (zh) 一种用于硅片视检的夹持装置、设备和方法
CN217619166U (zh) 一种加工中心向心式柔性夹持装置
JPS625741B2 (enrdf_load_stackoverflow)
JPS597501A (ja) 工作機械
JP4198238B2 (ja) 遊星歯車方式平行平面加工盤のワークキャリヤ停止位置制御装置
JP4242034B2 (ja) 研磨方法及び研磨装置
EP1080831B1 (en) Tool-exchange apparatus for machine tools
JPH01234134A (ja) 超精密正面旋盤
JP2006341367A (ja) 内歯シェービング装置
JPS6237631Y2 (enrdf_load_stackoverflow)
CN117444644B (zh) 一种高精度轴承圈车削装置
JPH0151304B2 (enrdf_load_stackoverflow)
JPS6218363Y2 (enrdf_load_stackoverflow)
JPH0357417Y2 (enrdf_load_stackoverflow)
JPH0222213Y2 (enrdf_load_stackoverflow)
JPH07164291A (ja) ウェーハ外周部の研磨装置
JPS62193757A (ja) 平面研磨装置