JPS58215052A - ウエハ−収納治具 - Google Patents

ウエハ−収納治具

Info

Publication number
JPS58215052A
JPS58215052A JP9807382A JP9807382A JPS58215052A JP S58215052 A JPS58215052 A JP S58215052A JP 9807382 A JP9807382 A JP 9807382A JP 9807382 A JP9807382 A JP 9807382A JP S58215052 A JPS58215052 A JP S58215052A
Authority
JP
Japan
Prior art keywords
wafer
groove
jig
ueno
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9807382A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6253948B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Koshimizu
輿水　弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9807382A priority Critical patent/JPS58215052A/ja
Publication of JPS58215052A publication Critical patent/JPS58215052A/ja
Publication of JPS6253948B2 publication Critical patent/JPS6253948B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging For Recording Disks (AREA)
  • Packaging Frangible Articles (AREA)
JP9807382A 1982-06-08 1982-06-08 ウエハ−収納治具 Granted JPS58215052A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9807382A JPS58215052A (ja) 1982-06-08 1982-06-08 ウエハ−収納治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9807382A JPS58215052A (ja) 1982-06-08 1982-06-08 ウエハ−収納治具

Publications (2)

Publication Number Publication Date
JPS58215052A true JPS58215052A (ja) 1983-12-14
JPS6253948B2 JPS6253948B2 (enrdf_load_stackoverflow) 1987-11-12

Family

ID=14210166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9807382A Granted JPS58215052A (ja) 1982-06-08 1982-06-08 ウエハ−収納治具

Country Status (1)

Country Link
JP (1) JPS58215052A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6389247U (enrdf_load_stackoverflow) * 1986-11-28 1988-06-10
EP1480256A3 (en) * 1995-06-26 2004-12-15 Miraial Co., Ltd. Thin-plate supporting container

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54140659U (enrdf_load_stackoverflow) * 1978-03-22 1979-09-29
JPS5524432A (en) * 1978-08-09 1980-02-21 Mitsubishi Electric Corp Sheet holding tool

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54140659U (enrdf_load_stackoverflow) * 1978-03-22 1979-09-29
JPS5524432A (en) * 1978-08-09 1980-02-21 Mitsubishi Electric Corp Sheet holding tool

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6389247U (enrdf_load_stackoverflow) * 1986-11-28 1988-06-10
EP1480256A3 (en) * 1995-06-26 2004-12-15 Miraial Co., Ltd. Thin-plate supporting container

Also Published As

Publication number Publication date
JPS6253948B2 (enrdf_load_stackoverflow) 1987-11-12

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