JPS6389247U - - Google Patents

Info

Publication number
JPS6389247U
JPS6389247U JP18386886U JP18386886U JPS6389247U JP S6389247 U JPS6389247 U JP S6389247U JP 18386886 U JP18386886 U JP 18386886U JP 18386886 U JP18386886 U JP 18386886U JP S6389247 U JPS6389247 U JP S6389247U
Authority
JP
Japan
Prior art keywords
semiconductor manufacturing
manufacturing jig
connecting member
side plates
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18386886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18386886U priority Critical patent/JPS6389247U/ja
Publication of JPS6389247U publication Critical patent/JPS6389247U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP18386886U 1986-11-28 1986-11-28 Pending JPS6389247U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18386886U JPS6389247U (enrdf_load_stackoverflow) 1986-11-28 1986-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18386886U JPS6389247U (enrdf_load_stackoverflow) 1986-11-28 1986-11-28

Publications (1)

Publication Number Publication Date
JPS6389247U true JPS6389247U (enrdf_load_stackoverflow) 1988-06-10

Family

ID=31130998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18386886U Pending JPS6389247U (enrdf_load_stackoverflow) 1986-11-28 1986-11-28

Country Status (1)

Country Link
JP (1) JPS6389247U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58215052A (ja) * 1982-06-08 1983-12-14 Nec Corp ウエハ−収納治具

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58215052A (ja) * 1982-06-08 1983-12-14 Nec Corp ウエハ−収納治具

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