JPS6331039U - - Google Patents
Info
- Publication number
- JPS6331039U JPS6331039U JP12178086U JP12178086U JPS6331039U JP S6331039 U JPS6331039 U JP S6331039U JP 12178086 U JP12178086 U JP 12178086U JP 12178086 U JP12178086 U JP 12178086U JP S6331039 U JPS6331039 U JP S6331039U
- Authority
- JP
- Japan
- Prior art keywords
- storage device
- stocker
- view
- storage
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Pile Receivers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12178086U JPS6331039U (enrdf_load_stackoverflow) | 1986-08-08 | 1986-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12178086U JPS6331039U (enrdf_load_stackoverflow) | 1986-08-08 | 1986-08-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6331039U true JPS6331039U (enrdf_load_stackoverflow) | 1988-02-29 |
Family
ID=31011364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12178086U Pending JPS6331039U (enrdf_load_stackoverflow) | 1986-08-08 | 1986-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6331039U (enrdf_load_stackoverflow) |
-
1986
- 1986-08-08 JP JP12178086U patent/JPS6331039U/ja active Pending
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