JPS5524432A - Sheet holding tool - Google Patents

Sheet holding tool

Info

Publication number
JPS5524432A
JPS5524432A JP9684078A JP9684078A JPS5524432A JP S5524432 A JPS5524432 A JP S5524432A JP 9684078 A JP9684078 A JP 9684078A JP 9684078 A JP9684078 A JP 9684078A JP S5524432 A JPS5524432 A JP S5524432A
Authority
JP
Japan
Prior art keywords
substrates
holding
holding tool
rotary plates
piles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9684078A
Other languages
Japanese (ja)
Other versions
JPS5832783B2 (en
Inventor
Masaaki Sadamori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9684078A priority Critical patent/JPS5832783B2/en
Publication of JPS5524432A publication Critical patent/JPS5524432A/en
Publication of JPS5832783B2 publication Critical patent/JPS5832783B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To make operation easy and secure by putting substrates arrayed oppositely each other beforehand in piles once, holding them at both ends and then shifting them at a stretch.
CONSTITUTION: A holding tool 31 and a carrier jig 30 are interlocked and then inverted. In this case where holding units 22, 23 and rotary plates 18, 19 are kept open, substrates 1 arrayed between grooves 3a, 3b of the jig 30 are shifted to the holding tool simultaneously. Operating pieces for the rotary plates are made to slide along the arched grooves to close the rotary plates 18, 19, the substrates are put together in piles, and bent parts of the holding units 22, 23 are made projecting through a slit. The holding units 22, 23 then hold the substrates 1 given in piles by the rotary plates 18, 19 partly at the outer perimeter. The carrier 30 is detached from the holding tool 31, and the holding tool is inverted to come over a diffusion boat 32. Simultaneously with opening the holding units 22, 23, the substrates 1 are shifted at a stretch. The holding tool 31 is removed and rods 8 are brought up near to completion in shifting. The substrates can thus be shifted easily and securely without stain or failure.
COPYRIGHT: (C)1980,JPO&Japio
JP9684078A 1978-08-09 1978-08-09 Thin plate gripper Expired JPS5832783B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9684078A JPS5832783B2 (en) 1978-08-09 1978-08-09 Thin plate gripper

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9684078A JPS5832783B2 (en) 1978-08-09 1978-08-09 Thin plate gripper

Publications (2)

Publication Number Publication Date
JPS5524432A true JPS5524432A (en) 1980-02-21
JPS5832783B2 JPS5832783B2 (en) 1983-07-15

Family

ID=14175709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9684078A Expired JPS5832783B2 (en) 1978-08-09 1978-08-09 Thin plate gripper

Country Status (1)

Country Link
JP (1) JPS5832783B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58215052A (en) * 1982-06-08 1983-12-14 Nec Corp Jig for wafer storage

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58215052A (en) * 1982-06-08 1983-12-14 Nec Corp Jig for wafer storage
JPS6253948B2 (en) * 1982-06-08 1987-11-12 Nippon Electric Co

Also Published As

Publication number Publication date
JPS5832783B2 (en) 1983-07-15

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