JPS58214258A - 走査型電子顕微鏡等の焦点検出装置 - Google Patents

走査型電子顕微鏡等の焦点検出装置

Info

Publication number
JPS58214258A
JPS58214258A JP57098189A JP9818982A JPS58214258A JP S58214258 A JPS58214258 A JP S58214258A JP 57098189 A JP57098189 A JP 57098189A JP 9818982 A JP9818982 A JP 9818982A JP S58214258 A JPS58214258 A JP S58214258A
Authority
JP
Japan
Prior art keywords
scanning
current
objective lens
circuit
maximum value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57098189A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0582011B2 (cg-RX-API-DMAC10.html
Inventor
Yuji Mori
森　優治
Kazuo Koyanagi
和夫 小柳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP57098189A priority Critical patent/JPS58214258A/ja
Publication of JPS58214258A publication Critical patent/JPS58214258A/ja
Publication of JPH0582011B2 publication Critical patent/JPH0582011B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57098189A 1982-06-07 1982-06-07 走査型電子顕微鏡等の焦点検出装置 Granted JPS58214258A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57098189A JPS58214258A (ja) 1982-06-07 1982-06-07 走査型電子顕微鏡等の焦点検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57098189A JPS58214258A (ja) 1982-06-07 1982-06-07 走査型電子顕微鏡等の焦点検出装置

Publications (2)

Publication Number Publication Date
JPS58214258A true JPS58214258A (ja) 1983-12-13
JPH0582011B2 JPH0582011B2 (cg-RX-API-DMAC10.html) 1993-11-17

Family

ID=14213063

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57098189A Granted JPS58214258A (ja) 1982-06-07 1982-06-07 走査型電子顕微鏡等の焦点検出装置

Country Status (1)

Country Link
JP (1) JPS58214258A (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01231251A (ja) * 1988-03-09 1989-09-14 Hitachi Ltd 電子顕微鏡の焦点合わせ装置
US5648027A (en) * 1993-11-01 1997-07-15 Osaka Gas Company Ltd. Porous carbonaceous material and a method for producing the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01199726A (ja) * 1988-02-03 1989-08-11 Fanuc Ltd ワイヤ張力，断線検出制御装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5264866A (en) * 1975-11-25 1977-05-28 Shimadzu Corp Focus detection unit of scanning-type electronic line equipment

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5264866A (en) * 1975-11-25 1977-05-28 Shimadzu Corp Focus detection unit of scanning-type electronic line equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01231251A (ja) * 1988-03-09 1989-09-14 Hitachi Ltd 電子顕微鏡の焦点合わせ装置
US5648027A (en) * 1993-11-01 1997-07-15 Osaka Gas Company Ltd. Porous carbonaceous material and a method for producing the same

Also Published As

Publication number Publication date
JPH0582011B2 (cg-RX-API-DMAC10.html) 1993-11-17

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