JPH0582011B2 - - Google Patents

Info

Publication number
JPH0582011B2
JPH0582011B2 JP57098189A JP9818982A JPH0582011B2 JP H0582011 B2 JPH0582011 B2 JP H0582011B2 JP 57098189 A JP57098189 A JP 57098189A JP 9818982 A JP9818982 A JP 9818982A JP H0582011 B2 JPH0582011 B2 JP H0582011B2
Authority
JP
Japan
Prior art keywords
objective lens
scanning
alternating current
component
video signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57098189A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58214258A (ja
Inventor
Juji Mori
Kazuo Koyanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP57098189A priority Critical patent/JPS58214258A/ja
Publication of JPS58214258A publication Critical patent/JPS58214258A/ja
Publication of JPH0582011B2 publication Critical patent/JPH0582011B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57098189A 1982-06-07 1982-06-07 走査型電子顕微鏡等の焦点検出装置 Granted JPS58214258A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57098189A JPS58214258A (ja) 1982-06-07 1982-06-07 走査型電子顕微鏡等の焦点検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57098189A JPS58214258A (ja) 1982-06-07 1982-06-07 走査型電子顕微鏡等の焦点検出装置

Publications (2)

Publication Number Publication Date
JPS58214258A JPS58214258A (ja) 1983-12-13
JPH0582011B2 true JPH0582011B2 (cg-RX-API-DMAC10.html) 1993-11-17

Family

ID=14213063

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57098189A Granted JPS58214258A (ja) 1982-06-07 1982-06-07 走査型電子顕微鏡等の焦点検出装置

Country Status (1)

Country Link
JP (1) JPS58214258A (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0355168B1 (en) * 1988-02-03 1992-08-19 Fanuc Ltd. Device for controlling wire tension and detecting breakage of wire

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0756786B2 (ja) * 1988-03-09 1995-06-14 株式会社日立製作所 電子顕微鏡の焦点合わせ装置
EP0651452A1 (en) * 1993-11-01 1995-05-03 Osaka Gas Co., Ltd. Porous carbonaceous material and a method for producing the same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5820100B2 (ja) * 1975-11-25 1983-04-21 株式会社島津製作所 ソウサガタデンシセンソウチ ノ シヨウテンケンシユツソウチ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0355168B1 (en) * 1988-02-03 1992-08-19 Fanuc Ltd. Device for controlling wire tension and detecting breakage of wire

Also Published As

Publication number Publication date
JPS58214258A (ja) 1983-12-13

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