JPS5264866A - Focus detection unit of scanning-type electronic line equipment - Google Patents
Focus detection unit of scanning-type electronic line equipmentInfo
- Publication number
- JPS5264866A JPS5264866A JP14128975A JP14128975A JPS5264866A JP S5264866 A JPS5264866 A JP S5264866A JP 14128975 A JP14128975 A JP 14128975A JP 14128975 A JP14128975 A JP 14128975A JP S5264866 A JPS5264866 A JP S5264866A
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- detection unit
- focus detection
- type electronic
- line equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To enhance detection accuracy with simplified circuit constitution by detecting peak through lowering standard level gradually.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14128975A JPS5820100B2 (en) | 1975-11-25 | 1975-11-25 | Information on how to proceed |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14128975A JPS5820100B2 (en) | 1975-11-25 | 1975-11-25 | Information on how to proceed |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5264866A true JPS5264866A (en) | 1977-05-28 |
JPS5820100B2 JPS5820100B2 (en) | 1983-04-21 |
Family
ID=15288412
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14128975A Expired JPS5820100B2 (en) | 1975-11-25 | 1975-11-25 | Information on how to proceed |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5820100B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58214258A (en) * | 1982-06-07 | 1983-12-13 | Shimadzu Corp | Focal point detection device for scanning type electron microscope and the like |
JPS5942750A (en) * | 1982-08-31 | 1984-03-09 | Shimadzu Corp | Focal point detector for charged particle beam scanning type microscope |
JPS5946746A (en) * | 1982-09-09 | 1984-03-16 | Nichidenshi Tekunikusu:Kk | Automatic focal point aligning unit for charged particle beam device |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0429031Y2 (en) * | 1984-10-18 | 1992-07-14 | ||
JPS6242658U (en) * | 1985-09-02 | 1987-03-14 | ||
JPH044198U (en) * | 1990-04-27 | 1992-01-14 |
-
1975
- 1975-11-25 JP JP14128975A patent/JPS5820100B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58214258A (en) * | 1982-06-07 | 1983-12-13 | Shimadzu Corp | Focal point detection device for scanning type electron microscope and the like |
JPH0582011B2 (en) * | 1982-06-07 | 1993-11-17 | Shimadzu Corp | |
JPS5942750A (en) * | 1982-08-31 | 1984-03-09 | Shimadzu Corp | Focal point detector for charged particle beam scanning type microscope |
JPS5946746A (en) * | 1982-09-09 | 1984-03-16 | Nichidenshi Tekunikusu:Kk | Automatic focal point aligning unit for charged particle beam device |
Also Published As
Publication number | Publication date |
---|---|
JPS5820100B2 (en) | 1983-04-21 |
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