JPS5264866A - Focus detection unit of scanning-type electronic line equipment - Google Patents

Focus detection unit of scanning-type electronic line equipment

Info

Publication number
JPS5264866A
JPS5264866A JP14128975A JP14128975A JPS5264866A JP S5264866 A JPS5264866 A JP S5264866A JP 14128975 A JP14128975 A JP 14128975A JP 14128975 A JP14128975 A JP 14128975A JP S5264866 A JPS5264866 A JP S5264866A
Authority
JP
Japan
Prior art keywords
scanning
detection unit
focus detection
type electronic
line equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14128975A
Other languages
Japanese (ja)
Other versions
JPS5820100B2 (en
Inventor
Gen Date
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimadzu Seisakusho Ltd
Original Assignee
Shimadzu Corp
Shimadzu Seisakusho Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimadzu Seisakusho Ltd filed Critical Shimadzu Corp
Priority to JP14128975A priority Critical patent/JPS5820100B2/en
Publication of JPS5264866A publication Critical patent/JPS5264866A/en
Publication of JPS5820100B2 publication Critical patent/JPS5820100B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To enhance detection accuracy with simplified circuit constitution by detecting peak through lowering standard level gradually.
COPYRIGHT: (C)1977,JPO&Japio
JP14128975A 1975-11-25 1975-11-25 Information on how to proceed Expired JPS5820100B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14128975A JPS5820100B2 (en) 1975-11-25 1975-11-25 Information on how to proceed

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14128975A JPS5820100B2 (en) 1975-11-25 1975-11-25 Information on how to proceed

Publications (2)

Publication Number Publication Date
JPS5264866A true JPS5264866A (en) 1977-05-28
JPS5820100B2 JPS5820100B2 (en) 1983-04-21

Family

ID=15288412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14128975A Expired JPS5820100B2 (en) 1975-11-25 1975-11-25 Information on how to proceed

Country Status (1)

Country Link
JP (1) JPS5820100B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58214258A (en) * 1982-06-07 1983-12-13 Shimadzu Corp Focal point detection device for scanning type electron microscope and the like
JPS5942750A (en) * 1982-08-31 1984-03-09 Shimadzu Corp Focal point detector for charged particle beam scanning type microscope
JPS5946746A (en) * 1982-09-09 1984-03-16 Nichidenshi Tekunikusu:Kk Automatic focal point aligning unit for charged particle beam device

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0429031Y2 (en) * 1984-10-18 1992-07-14
JPS6242658U (en) * 1985-09-02 1987-03-14
JPH044198U (en) * 1990-04-27 1992-01-14

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58214258A (en) * 1982-06-07 1983-12-13 Shimadzu Corp Focal point detection device for scanning type electron microscope and the like
JPH0582011B2 (en) * 1982-06-07 1993-11-17 Shimadzu Corp
JPS5942750A (en) * 1982-08-31 1984-03-09 Shimadzu Corp Focal point detector for charged particle beam scanning type microscope
JPS5946746A (en) * 1982-09-09 1984-03-16 Nichidenshi Tekunikusu:Kk Automatic focal point aligning unit for charged particle beam device

Also Published As

Publication number Publication date
JPS5820100B2 (en) 1983-04-21

Similar Documents

Publication Publication Date Title
JPS5264866A (en) Focus detection unit of scanning-type electronic line equipment
JPS51142372A (en) Time measuring device
JPS51121326A (en) Automatic focusing device for camera
JPS5360221A (en) Foot keyboard device of electronic musical instrument
JPS5234332A (en) System disturbance detector
JPS53122369A (en) Automatic alignment unit for wafer
JPS5212533A (en) Address position converting circuit
JPS51113755A (en) Unevenly-sinking tank detector
JPS5264865A (en) Focus detection unit of electronic line scanning-type image equipment
JPS53102612A (en) Companding circuit for signal
JPS5357878A (en) Peak value detector
JPS5241545A (en) Instrument structure
JPS53112675A (en) Discriminator for waveform
JPS5435655A (en) Picture discrimination unit
JPS5343854A (en) Overcurrent detection circuit
JPS5320252A (en) Position detecting apparatus for mobile body
JPS51129226A (en) Distance measure device
JPS5272257A (en) Multiple point type liquid level device
JPS53148253A (en) Sequence check circuit
JPS5224560A (en) Electronic liquid surface dtector
JPS522271A (en) Electromagnetic counter
JPS5376867A (en) Maximum and minimum detecting circuit
JPS525557A (en) Oscillator with agc
JPS52105724A (en) Light detect ic device
JPS51137847A (en) An earth trouble detecting apparatus with a detection circuit