JPS58212166A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS58212166A
JPS58212166A JP58090492A JP9049283A JPS58212166A JP S58212166 A JPS58212166 A JP S58212166A JP 58090492 A JP58090492 A JP 58090492A JP 9049283 A JP9049283 A JP 9049283A JP S58212166 A JPS58212166 A JP S58212166A
Authority
JP
Japan
Prior art keywords
film
electrode
gate electrode
wiring
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58090492A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6311778B2 (enExample
Inventor
Toshio Wada
和田　俊男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP58090492A priority Critical patent/JPS58212166A/ja
Publication of JPS58212166A publication Critical patent/JPS58212166A/ja
Publication of JPS6311778B2 publication Critical patent/JPS6311778B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells

Landscapes

  • Static Random-Access Memory (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Memories (AREA)
JP58090492A 1983-05-23 1983-05-23 半導体装置の製造方法 Granted JPS58212166A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58090492A JPS58212166A (ja) 1983-05-23 1983-05-23 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58090492A JPS58212166A (ja) 1983-05-23 1983-05-23 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP50071749A Division JPS6034261B2 (ja) 1975-06-13 1975-06-13 集積回路

Publications (2)

Publication Number Publication Date
JPS58212166A true JPS58212166A (ja) 1983-12-09
JPS6311778B2 JPS6311778B2 (enExample) 1988-03-16

Family

ID=14000018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58090492A Granted JPS58212166A (ja) 1983-05-23 1983-05-23 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58212166A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63136649A (ja) * 1986-11-28 1988-06-08 Sony Corp 多層配線形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63136649A (ja) * 1986-11-28 1988-06-08 Sony Corp 多層配線形成方法

Also Published As

Publication number Publication date
JPS6311778B2 (enExample) 1988-03-16

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