JPS6341224B2 - - Google Patents

Info

Publication number
JPS6341224B2
JPS6341224B2 JP54120629A JP12062979A JPS6341224B2 JP S6341224 B2 JPS6341224 B2 JP S6341224B2 JP 54120629 A JP54120629 A JP 54120629A JP 12062979 A JP12062979 A JP 12062979A JP S6341224 B2 JPS6341224 B2 JP S6341224B2
Authority
JP
Japan
Prior art keywords
layer
strip
insulating layer
shaped conductor
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54120629A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5645068A (en
Inventor
Yasunobu Osa
Jun Sugiura
Kazuhiro Komori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12062979A priority Critical patent/JPS5645068A/ja
Publication of JPS5645068A publication Critical patent/JPS5645068A/ja
Publication of JPS6341224B2 publication Critical patent/JPS6341224B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
JP12062979A 1979-09-21 1979-09-21 Manufacture of semiconductor Granted JPS5645068A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12062979A JPS5645068A (en) 1979-09-21 1979-09-21 Manufacture of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12062979A JPS5645068A (en) 1979-09-21 1979-09-21 Manufacture of semiconductor

Publications (2)

Publication Number Publication Date
JPS5645068A JPS5645068A (en) 1981-04-24
JPS6341224B2 true JPS6341224B2 (enExample) 1988-08-16

Family

ID=14790946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12062979A Granted JPS5645068A (en) 1979-09-21 1979-09-21 Manufacture of semiconductor

Country Status (1)

Country Link
JP (1) JPS5645068A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI66487C (fi) * 1980-06-19 1984-10-10 Outokumpu Oy Anordning foer foerflyttning av fast material som matas pao ytn av en smaelta samt foer krossning av slaggskorpa som bi ldts pao smaeltans yta
JPH0783066B2 (ja) * 1989-08-11 1995-09-06 株式会社東芝 半導体装置の製造方法
JP2825585B2 (ja) * 1990-01-29 1998-11-18 株式会社日立製作所 半導体集積回路装置及びその製造方法
JPH08102531A (ja) * 1994-09-30 1996-04-16 Toshiba Corp 半導体記憶装置及びその製造方法

Also Published As

Publication number Publication date
JPS5645068A (en) 1981-04-24

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