JPS58210556A - X線分光分析装置 - Google Patents

X線分光分析装置

Info

Publication number
JPS58210556A
JPS58210556A JP57093667A JP9366782A JPS58210556A JP S58210556 A JPS58210556 A JP S58210556A JP 57093667 A JP57093667 A JP 57093667A JP 9366782 A JP9366782 A JP 9366782A JP S58210556 A JPS58210556 A JP S58210556A
Authority
JP
Japan
Prior art keywords
ray
peak
detected
spectrometer
wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57093667A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0464024B2 (enrdf_load_stackoverflow
Inventor
Masao Kawai
河合 政夫
Fukuo Zenitani
銭谷 福男
Yuji Mori
森 優治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP57093667A priority Critical patent/JPS58210556A/ja
Publication of JPS58210556A publication Critical patent/JPS58210556A/ja
Publication of JPH0464024B2 publication Critical patent/JPH0464024B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2209Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using wavelength dispersive spectroscopy [WDS]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/07Investigating materials by wave or particle radiation secondary emission
    • G01N2223/079Investigating materials by wave or particle radiation secondary emission incident electron beam and measuring excited X-rays
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/30Accessories, mechanical or electrical features
    • G01N2223/302Accessories, mechanical or electrical features comparative arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP57093667A 1982-05-31 1982-05-31 X線分光分析装置 Granted JPS58210556A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57093667A JPS58210556A (ja) 1982-05-31 1982-05-31 X線分光分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57093667A JPS58210556A (ja) 1982-05-31 1982-05-31 X線分光分析装置

Publications (2)

Publication Number Publication Date
JPS58210556A true JPS58210556A (ja) 1983-12-07
JPH0464024B2 JPH0464024B2 (enrdf_load_stackoverflow) 1992-10-13

Family

ID=14088743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57093667A Granted JPS58210556A (ja) 1982-05-31 1982-05-31 X線分光分析装置

Country Status (1)

Country Link
JP (1) JPS58210556A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60135849A (ja) * 1983-12-26 1985-07-19 Shimadzu Corp エレクトロンプロ−ブマイクロアナライザによる定性分析方法
JPS60135848A (ja) * 1983-12-26 1985-07-19 Shimadzu Corp エレクトロンプロ−ブマイクロアナライザによる定性分析方法
JPS623652A (ja) * 1985-06-28 1987-01-09 Shimadzu Corp X線分光法による定性分析方式
JPS62165144A (ja) * 1986-01-16 1987-07-21 Jeol Ltd X線マイクロアナライザの波長表検索方法
JPS62165143A (ja) * 1986-01-16 1987-07-21 Jeol Ltd X線マイクロアナライザの波長表検索方法
JPH01314956A (ja) * 1988-06-16 1989-12-20 Shimadzu Corp X線分光分析におけるデータ処理方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5081387A (enrdf_load_stackoverflow) * 1973-11-20 1975-07-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5081387A (enrdf_load_stackoverflow) * 1973-11-20 1975-07-02

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60135849A (ja) * 1983-12-26 1985-07-19 Shimadzu Corp エレクトロンプロ−ブマイクロアナライザによる定性分析方法
JPS60135848A (ja) * 1983-12-26 1985-07-19 Shimadzu Corp エレクトロンプロ−ブマイクロアナライザによる定性分析方法
JPS623652A (ja) * 1985-06-28 1987-01-09 Shimadzu Corp X線分光法による定性分析方式
JPS62165144A (ja) * 1986-01-16 1987-07-21 Jeol Ltd X線マイクロアナライザの波長表検索方法
JPS62165143A (ja) * 1986-01-16 1987-07-21 Jeol Ltd X線マイクロアナライザの波長表検索方法
JPH01314956A (ja) * 1988-06-16 1989-12-20 Shimadzu Corp X線分光分析におけるデータ処理方法

Also Published As

Publication number Publication date
JPH0464024B2 (enrdf_load_stackoverflow) 1992-10-13

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