JPS58210168A - 二層膜のエツチング方法 - Google Patents

二層膜のエツチング方法

Info

Publication number
JPS58210168A
JPS58210168A JP9121182A JP9121182A JPS58210168A JP S58210168 A JPS58210168 A JP S58210168A JP 9121182 A JP9121182 A JP 9121182A JP 9121182 A JP9121182 A JP 9121182A JP S58210168 A JPS58210168 A JP S58210168A
Authority
JP
Japan
Prior art keywords
film
etching
layer
pattern
etched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9121182A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6216273B2 (US07321065-20080122-C00020.png
Inventor
Hirotake Nakayama
仲山　浩偉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9121182A priority Critical patent/JPS58210168A/ja
Publication of JPS58210168A publication Critical patent/JPS58210168A/ja
Publication of JPS6216273B2 publication Critical patent/JPS6216273B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP9121182A 1982-05-31 1982-05-31 二層膜のエツチング方法 Granted JPS58210168A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9121182A JPS58210168A (ja) 1982-05-31 1982-05-31 二層膜のエツチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9121182A JPS58210168A (ja) 1982-05-31 1982-05-31 二層膜のエツチング方法

Publications (2)

Publication Number Publication Date
JPS58210168A true JPS58210168A (ja) 1983-12-07
JPS6216273B2 JPS6216273B2 (US07321065-20080122-C00020.png) 1987-04-11

Family

ID=14020080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9121182A Granted JPS58210168A (ja) 1982-05-31 1982-05-31 二層膜のエツチング方法

Country Status (1)

Country Link
JP (1) JPS58210168A (US07321065-20080122-C00020.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01146866U (US07321065-20080122-C00020.png) * 1988-03-31 1989-10-11
JPH0365482U (US07321065-20080122-C00020.png) * 1989-10-26 1991-06-26

Also Published As

Publication number Publication date
JPS6216273B2 (US07321065-20080122-C00020.png) 1987-04-11

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