JPS58192370A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS58192370A
JPS58192370A JP57075223A JP7522382A JPS58192370A JP S58192370 A JPS58192370 A JP S58192370A JP 57075223 A JP57075223 A JP 57075223A JP 7522382 A JP7522382 A JP 7522382A JP S58192370 A JPS58192370 A JP S58192370A
Authority
JP
Japan
Prior art keywords
metal layer
semiconductor device
wafer
layer
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57075223A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0423821B2 (enrdf_load_stackoverflow
Inventor
Mitsuhiro Mori
森　光廣
Katsutoshi Saito
斉藤　勝利
Takao Mori
孝夫 森
Katsuaki Chiba
千葉　勝昭
Masayoshi Kobayashi
正義 小林
Nobu Satou
佐藤　矗
Hiroshi Kato
弘 加藤
Masamichi Kobayashi
正道 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57075223A priority Critical patent/JPS58192370A/ja
Publication of JPS58192370A publication Critical patent/JPS58192370A/ja
Publication of JPH0423821B2 publication Critical patent/JPH0423821B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/62—Electrodes ohmically coupled to a semiconductor

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Semiconductor Lasers (AREA)
JP57075223A 1982-05-07 1982-05-07 半導体装置の製造方法 Granted JPS58192370A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57075223A JPS58192370A (ja) 1982-05-07 1982-05-07 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57075223A JPS58192370A (ja) 1982-05-07 1982-05-07 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS58192370A true JPS58192370A (ja) 1983-11-09
JPH0423821B2 JPH0423821B2 (enrdf_load_stackoverflow) 1992-04-23

Family

ID=13570008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57075223A Granted JPS58192370A (ja) 1982-05-07 1982-05-07 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58192370A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0460531A1 (de) * 1990-06-07 1991-12-11 Siemens Aktiengesellschaft Kontaktmetallisierung auf Halbleitermaterial

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5092083A (enrdf_load_stackoverflow) * 1973-12-12 1975-07-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5092083A (enrdf_load_stackoverflow) * 1973-12-12 1975-07-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0460531A1 (de) * 1990-06-07 1991-12-11 Siemens Aktiengesellschaft Kontaktmetallisierung auf Halbleitermaterial

Also Published As

Publication number Publication date
JPH0423821B2 (enrdf_load_stackoverflow) 1992-04-23

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