JPS5818780B2 - 半導体ペレットの検出方法 - Google Patents

半導体ペレットの検出方法

Info

Publication number
JPS5818780B2
JPS5818780B2 JP50018288A JP1828875A JPS5818780B2 JP S5818780 B2 JPS5818780 B2 JP S5818780B2 JP 50018288 A JP50018288 A JP 50018288A JP 1828875 A JP1828875 A JP 1828875A JP S5818780 B2 JPS5818780 B2 JP S5818780B2
Authority
JP
Japan
Prior art keywords
semiconductor
wafer
probing
photosensitive agent
pellets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50018288A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5193169A (online.php
Inventor
市川亮平
長野修
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP50018288A priority Critical patent/JPS5818780B2/ja
Publication of JPS5193169A publication Critical patent/JPS5193169A/ja
Publication of JPS5818780B2 publication Critical patent/JPS5818780B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP50018288A 1975-02-12 1975-02-12 半導体ペレットの検出方法 Expired JPS5818780B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50018288A JPS5818780B2 (ja) 1975-02-12 1975-02-12 半導体ペレットの検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50018288A JPS5818780B2 (ja) 1975-02-12 1975-02-12 半導体ペレットの検出方法

Publications (2)

Publication Number Publication Date
JPS5193169A JPS5193169A (online.php) 1976-08-16
JPS5818780B2 true JPS5818780B2 (ja) 1983-04-14

Family

ID=11967429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50018288A Expired JPS5818780B2 (ja) 1975-02-12 1975-02-12 半導体ペレットの検出方法

Country Status (1)

Country Link
JP (1) JPS5818780B2 (online.php)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5599736A (en) * 1979-01-25 1980-07-30 Nec Corp Marking method for semiconductor wafer

Also Published As

Publication number Publication date
JPS5193169A (online.php) 1976-08-16

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