JPS5817616A - 移動ステ−ジ - Google Patents

移動ステ−ジ

Info

Publication number
JPS5817616A
JPS5817616A JP11522881A JP11522881A JPS5817616A JP S5817616 A JPS5817616 A JP S5817616A JP 11522881 A JP11522881 A JP 11522881A JP 11522881 A JP11522881 A JP 11522881A JP S5817616 A JPS5817616 A JP S5817616A
Authority
JP
Japan
Prior art keywords
slider
guide
bearer
stage
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11522881A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332206B2 (cs
Inventor
Satoshi Ido
井戸　敏
Akihira Fujinami
藤波　明平
Haruo Tsuyusaki
露崎　晴夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP11522881A priority Critical patent/JPS5817616A/ja
Publication of JPS5817616A publication Critical patent/JPS5817616A/ja
Publication of JPH0332206B2 publication Critical patent/JPH0332206B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Machine Tool Units (AREA)
  • Electron Beam Exposure (AREA)
JP11522881A 1981-07-24 1981-07-24 移動ステ−ジ Granted JPS5817616A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11522881A JPS5817616A (ja) 1981-07-24 1981-07-24 移動ステ−ジ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11522881A JPS5817616A (ja) 1981-07-24 1981-07-24 移動ステ−ジ

Publications (2)

Publication Number Publication Date
JPS5817616A true JPS5817616A (ja) 1983-02-01
JPH0332206B2 JPH0332206B2 (cs) 1991-05-10

Family

ID=14657516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11522881A Granted JPS5817616A (ja) 1981-07-24 1981-07-24 移動ステ−ジ

Country Status (1)

Country Link
JP (1) JPS5817616A (cs)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6069593A (ja) * 1983-09-26 1985-04-20 オムロン株式会社 微動ステ−ジ機構
JPH01169394A (ja) * 1987-12-25 1989-07-04 Hitachi Ltd 真空容器用ｘｙステージ
JPH02160441A (ja) * 1989-11-08 1990-06-20 Brother Ind Ltd テーブル装置
WO2009092493A1 (de) * 2008-01-25 2009-07-30 Schaeffler Kg Linearführung mit einer brems- und/oder klemmvorrichtung

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6069593A (ja) * 1983-09-26 1985-04-20 オムロン株式会社 微動ステ−ジ機構
JPH01169394A (ja) * 1987-12-25 1989-07-04 Hitachi Ltd 真空容器用ｘｙステージ
JPH02160441A (ja) * 1989-11-08 1990-06-20 Brother Ind Ltd テーブル装置
WO2009092493A1 (de) * 2008-01-25 2009-07-30 Schaeffler Kg Linearführung mit einer brems- und/oder klemmvorrichtung

Also Published As

Publication number Publication date
JPH0332206B2 (cs) 1991-05-10

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