JPS58174568A - 金属化合物被膜の形成方法 - Google Patents

金属化合物被膜の形成方法

Info

Publication number
JPS58174568A
JPS58174568A JP5723882A JP5723882A JPS58174568A JP S58174568 A JPS58174568 A JP S58174568A JP 5723882 A JP5723882 A JP 5723882A JP 5723882 A JP5723882 A JP 5723882A JP S58174568 A JPS58174568 A JP S58174568A
Authority
JP
Japan
Prior art keywords
cathode
vapor deposition
metal compound
cooling
introducing pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5723882A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6134507B2 (enrdf_load_html_response
Inventor
Takeshi Yasui
安井　毅
Masahiko Hirose
広瀬　昌彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5723882A priority Critical patent/JPS58174568A/ja
Publication of JPS58174568A publication Critical patent/JPS58174568A/ja
Publication of JPS6134507B2 publication Critical patent/JPS6134507B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using DC or AC discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Chemical Vapour Deposition (AREA)
JP5723882A 1982-04-08 1982-04-08 金属化合物被膜の形成方法 Granted JPS58174568A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5723882A JPS58174568A (ja) 1982-04-08 1982-04-08 金属化合物被膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5723882A JPS58174568A (ja) 1982-04-08 1982-04-08 金属化合物被膜の形成方法

Publications (2)

Publication Number Publication Date
JPS58174568A true JPS58174568A (ja) 1983-10-13
JPS6134507B2 JPS6134507B2 (enrdf_load_html_response) 1986-08-08

Family

ID=13049944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5723882A Granted JPS58174568A (ja) 1982-04-08 1982-04-08 金属化合物被膜の形成方法

Country Status (1)

Country Link
JP (1) JPS58174568A (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62294160A (ja) * 1986-06-13 1987-12-21 バルツエルス　アクチエンゲゼルシヤフト 反応性気体プラズマ中での材料の熱化学的表面処理方法
CN113235069A (zh) * 2021-05-11 2021-08-10 中国石油天然气集团有限公司 一种抗腐蚀的氮化钛耐磨涂层及其制备方法和包含该涂层的制品

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0722339A (ja) * 1993-07-05 1995-01-24 Toshiba Corp 薄膜形成方法
JPH0719865U (ja) * 1993-08-20 1995-04-07 日本コロムビア株式会社 ディスク収納装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62294160A (ja) * 1986-06-13 1987-12-21 バルツエルス　アクチエンゲゼルシヤフト 反応性気体プラズマ中での材料の熱化学的表面処理方法
CN113235069A (zh) * 2021-05-11 2021-08-10 中国石油天然气集团有限公司 一种抗腐蚀的氮化钛耐磨涂层及其制备方法和包含该涂层的制品

Also Published As

Publication number Publication date
JPS6134507B2 (enrdf_load_html_response) 1986-08-08

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