JPS58162806A - 凹凸形状測定装置 - Google Patents

凹凸形状測定装置

Info

Publication number
JPS58162806A
JPS58162806A JP4451082A JP4451082A JPS58162806A JP S58162806 A JPS58162806 A JP S58162806A JP 4451082 A JP4451082 A JP 4451082A JP 4451082 A JP4451082 A JP 4451082A JP S58162806 A JPS58162806 A JP S58162806A
Authority
JP
Japan
Prior art keywords
light
light beam
photodetector
uneven shape
intensity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4451082A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6312524B2 (cs
Inventor
Takashi Yamaguchi
隆 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4451082A priority Critical patent/JPS58162806A/ja
Publication of JPS58162806A publication Critical patent/JPS58162806A/ja
Publication of JPS6312524B2 publication Critical patent/JPS6312524B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP4451082A 1982-03-23 1982-03-23 凹凸形状測定装置 Granted JPS58162806A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4451082A JPS58162806A (ja) 1982-03-23 1982-03-23 凹凸形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4451082A JPS58162806A (ja) 1982-03-23 1982-03-23 凹凸形状測定装置

Publications (2)

Publication Number Publication Date
JPS58162806A true JPS58162806A (ja) 1983-09-27
JPS6312524B2 JPS6312524B2 (cs) 1988-03-19

Family

ID=12693544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4451082A Granted JPS58162806A (ja) 1982-03-23 1982-03-23 凹凸形状測定装置

Country Status (1)

Country Link
JP (1) JPS58162806A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60237308A (ja) * 1984-05-11 1985-11-26 Toshiba Corp 深さ測定装置
WO2008156053A1 (ja) * 2007-06-20 2008-12-24 Nikon Corporation パターンのピッチ測定装置及び方法並びに表面検査装置及び方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60237308A (ja) * 1984-05-11 1985-11-26 Toshiba Corp 深さ測定装置
WO2008156053A1 (ja) * 2007-06-20 2008-12-24 Nikon Corporation パターンのピッチ測定装置及び方法並びに表面検査装置及び方法

Also Published As

Publication number Publication date
JPS6312524B2 (cs) 1988-03-19

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