JPS58161768A - スズの真空蒸着法 - Google Patents

スズの真空蒸着法

Info

Publication number
JPS58161768A
JPS58161768A JP4243382A JP4243382A JPS58161768A JP S58161768 A JPS58161768 A JP S58161768A JP 4243382 A JP4243382 A JP 4243382A JP 4243382 A JP4243382 A JP 4243382A JP S58161768 A JPS58161768 A JP S58161768A
Authority
JP
Japan
Prior art keywords
vapor
substrate
sns2
vacuum
gaseous hydrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4243382A
Other languages
English (en)
Japanese (ja)
Other versions
JPS617471B2 (OSRAM
Inventor
Kazutoshi Nagai
一敏 長井
Hiroki Kuwano
博喜 桑野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP4243382A priority Critical patent/JPS58161768A/ja
Publication of JPS58161768A publication Critical patent/JPS58161768A/ja
Publication of JPS617471B2 publication Critical patent/JPS617471B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP4243382A 1982-03-17 1982-03-17 スズの真空蒸着法 Granted JPS58161768A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4243382A JPS58161768A (ja) 1982-03-17 1982-03-17 スズの真空蒸着法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4243382A JPS58161768A (ja) 1982-03-17 1982-03-17 スズの真空蒸着法

Publications (2)

Publication Number Publication Date
JPS58161768A true JPS58161768A (ja) 1983-09-26
JPS617471B2 JPS617471B2 (OSRAM) 1986-03-06

Family

ID=12635930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4243382A Granted JPS58161768A (ja) 1982-03-17 1982-03-17 スズの真空蒸着法

Country Status (1)

Country Link
JP (1) JPS58161768A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109956495A (zh) * 2017-12-25 2019-07-02 中国科学院物理研究所 直立交错式花瓣状二硫化锡纳米片及其制备方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109956495A (zh) * 2017-12-25 2019-07-02 中国科学院物理研究所 直立交错式花瓣状二硫化锡纳米片及其制备方法

Also Published As

Publication number Publication date
JPS617471B2 (OSRAM) 1986-03-06

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