JPS58160308U - 膜厚モニタ - Google Patents

膜厚モニタ

Info

Publication number
JPS58160308U
JPS58160308U JP5829682U JP5829682U JPS58160308U JP S58160308 U JPS58160308 U JP S58160308U JP 5829682 U JP5829682 U JP 5829682U JP 5829682 U JP5829682 U JP 5829682U JP S58160308 U JPS58160308 U JP S58160308U
Authority
JP
Japan
Prior art keywords
film thickness
thickness monitor
evaporated
film
abstract
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5829682U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6315769Y2 (enrdf_load_stackoverflow
Inventor
渡辺　完治
男谷　忠義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP5829682U priority Critical patent/JPS58160308U/ja
Publication of JPS58160308U publication Critical patent/JPS58160308U/ja
Application granted granted Critical
Publication of JPS6315769Y2 publication Critical patent/JPS6315769Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
JP5829682U 1982-04-21 1982-04-21 膜厚モニタ Granted JPS58160308U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5829682U JPS58160308U (ja) 1982-04-21 1982-04-21 膜厚モニタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5829682U JPS58160308U (ja) 1982-04-21 1982-04-21 膜厚モニタ

Publications (2)

Publication Number Publication Date
JPS58160308U true JPS58160308U (ja) 1983-10-25
JPS6315769Y2 JPS6315769Y2 (enrdf_load_stackoverflow) 1988-05-06

Family

ID=30068693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5829682U Granted JPS58160308U (ja) 1982-04-21 1982-04-21 膜厚モニタ

Country Status (1)

Country Link
JP (1) JPS58160308U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53106759U (enrdf_load_stackoverflow) * 1977-01-31 1978-08-28
JPS58174804A (ja) * 1982-04-07 1983-10-13 Matsushita Electric Ind Co Ltd 膜厚測定装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53106759U (enrdf_load_stackoverflow) * 1977-01-31 1978-08-28
JPS58174804A (ja) * 1982-04-07 1983-10-13 Matsushita Electric Ind Co Ltd 膜厚測定装置

Also Published As

Publication number Publication date
JPS6315769Y2 (enrdf_load_stackoverflow) 1988-05-06

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