JPS58160308U - Film thickness monitor - Google Patents

Film thickness monitor

Info

Publication number
JPS58160308U
JPS58160308U JP5829682U JP5829682U JPS58160308U JP S58160308 U JPS58160308 U JP S58160308U JP 5829682 U JP5829682 U JP 5829682U JP 5829682 U JP5829682 U JP 5829682U JP S58160308 U JPS58160308 U JP S58160308U
Authority
JP
Japan
Prior art keywords
film thickness
thickness monitor
evaporated
film
abstract
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5829682U
Other languages
Japanese (ja)
Other versions
JPS6315769Y2 (en
Inventor
渡辺　完治
男谷　忠義
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP5829682U priority Critical patent/JPS58160308U/en
Publication of JPS58160308U publication Critical patent/JPS58160308U/en
Application granted granted Critical
Publication of JPS6315769Y2 publication Critical patent/JPS6315769Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示した高周波イオンブレー
ティング装置、第２図ａ乃至Ｃはその一部構成要素の例
を示す図、第３図及び第４図ａ。 ｂは他の例を示す図である。 １：被排気室、４：基板、５ニルツボ、１０：水晶振動
子、１１：水晶振動子電源、１２：検出回路、１４：メ
ツシュ板。FIG. 1 is a high-frequency ion brating device showing an embodiment of the present invention, FIGS. 2a to 2C are views showing examples of some of its components, and FIGS. 3 and 4a. b is a diagram showing another example. 1: Exhaust chamber, 4: Substrate, 5 Nil point, 10: Crystal resonator, 11: Crystal resonator power supply, 12: Detection circuit, 14: Mesh plate.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 被排気室内で基板に蒸発粒子を膜状に付着する状態をモ
ニタする為の水晶振動子膜厚モニタの少なくとも蒸発粒
子付着面近傍に、スリット又はメツシュ状の孔を有する
部材を配置したことを特徴とする膜厚モニタ。A member having slits or mesh-like holes is disposed at least near the evaporated particle adhesion surface of a crystal oscillator film thickness monitor for monitoring the state in which evaporated particles adhere to the substrate in the form of a film in the evacuated chamber. Film thickness monitor.
JP5829682U 1982-04-21 1982-04-21 Film thickness monitor Granted JPS58160308U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5829682U JPS58160308U (en) 1982-04-21 1982-04-21 Film thickness monitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5829682U JPS58160308U (en) 1982-04-21 1982-04-21 Film thickness monitor

Publications (2)

Publication Number Publication Date
JPS58160308U true JPS58160308U (en) 1983-10-25
JPS6315769Y2 JPS6315769Y2 (en) 1988-05-06

Family

ID=30068693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5829682U Granted JPS58160308U (en) 1982-04-21 1982-04-21 Film thickness monitor

Country Status (1)

Country Link
JP (1) JPS58160308U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53106759U (en) * 1977-01-31 1978-08-28
JPS58174804A (en) * 1982-04-07 1983-10-13 Matsushita Electric Ind Co Ltd Film thickness measuring device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53106759U (en) * 1977-01-31 1978-08-28
JPS58174804A (en) * 1982-04-07 1983-10-13 Matsushita Electric Ind Co Ltd Film thickness measuring device

Also Published As

Publication number Publication date
JPS6315769Y2 (en) 1988-05-06

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