JPS58160309U - Film thickness monitor - Google Patents
Film thickness monitorInfo
- Publication number
- JPS58160309U JPS58160309U JP5829882U JP5829882U JPS58160309U JP S58160309 U JPS58160309 U JP S58160309U JP 5829882 U JP5829882 U JP 5829882U JP 5829882 U JP5829882 U JP 5829882U JP S58160309 U JPS58160309 U JP S58160309U
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- thickness monitor
- electrode
- substrate
- evaporated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一使用例を示した高周波イオンブレー
ティング装置、第２図ａ〜Ｃはその一部構成要素の例を
示したものである。
１：被排気室、４：基板、５ニルツボ、１０：水晶振動
子、１１・・・水晶振動子電源、１２：検出回路、１４
：メツシュ状電極板。FIG. 1 shows a high-frequency ion brating device showing an example of the use of the present invention, and FIGS. 2A to 2C show examples of some of its components. 1: Exhaust chamber, 4: Substrate, 5 Nil point, 10: Crystal resonator, 11... Crystal resonator power supply, 12: Detection circuit, 14
:Mesh-like electrode plate.
Claims (1)
ニタする為の水晶振動子膜厚モニタの少なくとも蒸発粒
子付着面近傍に＾電極を配置し、該電極に前記基板電位
に対応した電圧を印加するようになした膜厚モニタ。An electrode is arranged at least near the evaporated particle adhesion surface of a crystal oscillator film thickness monitor for monitoring the state in which evaporated particles adhere to the substrate in the form of a film in the evacuated chamber, and a voltage corresponding to the substrate potential is applied to the electrode. A film thickness monitor that applies .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5829882U JPS58160309U (en) | 1982-04-21 | 1982-04-21 | Film thickness monitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5829882U JPS58160309U (en) | 1982-04-21 | 1982-04-21 | Film thickness monitor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58160309U true JPS58160309U (en) | 1983-10-25 |
Family
ID=30068695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5829882U Pending JPS58160309U (en) | 1982-04-21 | 1982-04-21 | Film thickness monitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58160309U (en) |
-
1982
- 1982-04-21 JP JP5829882U patent/JPS58160309U/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS58160309U (en) | Film thickness monitor | |
| JPS58160308U (en) | Film thickness monitor | |
| JPS59103756U (en) | Electrode for high frequency plasma excitation | |
| JPS6144933U (en) | crystal oscillator for monitor | |
| JPS59187136U (en) | Semiconductor thin film forming equipment | |
| JPS5868958U (en) | Glow discharge CVD equipment | |
| JPS6124469U (en) | Ion plating device | |
| JPS5983971U (en) | Ion plating device | |
| JPS5923613U (en) | Crystal oscillator for coating amount measurement | |
| JPS6139156U (en) | Thin film forming equipment | |
| JPS59160556U (en) | Ion plating device | |
| JPS60151295U (en) | Electrode for low temperature plasma generation | |
| JPS5969966U (en) | Glow discharge generator | |
| JPS5988459U (en) | sputtering equipment | |
| JPS5969965U (en) | Glow discharge generator | |
| JPS58103045U (en) | dry developing device | |
| JPS5878967U (en) | Ion bracing device | |
| JPS60185656U (en) | High frequency sputtering device | |
| JPS6097766U (en) | sputtering device | |
| JPS6087118U (en) | contact | |
| JPS58120645U (en) | Vacuum processing equipment | |
| JPS5995157U (en) | Ion plating device | |
| JPS592132U (en) | Plasma CVD equipment | |
| JPS59178898U (en) | plasma generator | |
| JPS5933322U (en) | Airtight terminal plate pin |