JPS6144926U - crystal oscillator for monitor - Google Patents
crystal oscillator for monitorInfo
- Publication number
- JPS6144926U JPS6144926U JP13005284U JP13005284U JPS6144926U JP S6144926 U JPS6144926 U JP S6144926U JP 13005284 U JP13005284 U JP 13005284U JP 13005284 U JP13005284 U JP 13005284U JP S6144926 U JPS6144926 U JP S6144926U
- Authority
- JP
- Japan
- Prior art keywords
- crystal oscillator
- particles
- monitor
- mass
- plate surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例に用いるモニター用水晶振動
子の一例を示す側断面図、第２図は電極の蒸着装置の一
例を示す概略構成図、第３図ａおよび第３図ｂは蒸着源
に対して平行に配置した場合の蒸着質比を説明する図、
第４図は蒸着時のモニター用水晶振動子の周波数変化と
通電電流の変化を示す図、第５図は第１図のＤ−Ｄ線矢
示断面図、第６図は第１図に示す振動子の底面図、第７
図は第１図に示すモニター用水晶振動子を用いた装置に
おけるモニター用水晶振動子の周波数および通電電流の
変化を示す図である。
１・・・・・・容器、３・・・・・・水晶片、４・・・
・・・モニター用水晶振動子、５・・・・・・制御装置
、６・・・・・・蒸着源、１２・・・・・・軟性物質。FIG. 1 is a side sectional view showing an example of a monitoring crystal resonator used in an embodiment of the present invention, FIG. 2 is a schematic configuration diagram showing an example of an electrode vapor deposition apparatus, and FIGS. 3a and 3b. is a diagram explaining the deposition quality ratio when placed parallel to the deposition source,
Figure 4 is a diagram showing changes in the frequency of the monitoring crystal oscillator and changes in the applied current during vapor deposition, Figure 5 is a sectional view taken along the line D-D in Figure 1, and Figure 6 is shown in Figure 1. Bottom view of the vibrator, No. 7
The figure is a diagram showing changes in the frequency and current of the monitoring crystal oscillator in a device using the monitoring crystal oscillator shown in FIG. 1...Container, 3...Crystal piece, 4...
... Monitoring crystal oscillator, 5 ... Control device, 6 ... Vapor deposition source, 12 ... Soft substance.
Claims (1)
に形成された電極に付着させ、前記水晶振動子の電極に
付着した粒子の質量によって変化′する振動周波数の変
化量から前記粒子が前記蒸着体に付着［７て形成される
薄膜の量を検出するモニタ用水晶振動子において、前記
粒子の質量により連続的に変化する前記水晶振動子の振
動周波数に対して発生する不要振動を抑制するために前
記水晶振動子の少なくとも一側の板面を軟性物質を介し
て保持することを特徴とするモニタ用水晶振動子。Particles generated from an evaporation source are attached to electrodes formed on the plate surface of the evaporation target and a crystal oscillator, and the particles are determined from the amount of change in the vibration frequency that changes depending on the mass of the particles attached to the electrodes of the quartz crystal oscillator. In a monitoring crystal oscillator that detects the amount of a thin film formed by adhering to the vapor deposited body [7], unnecessary vibrations that occur with respect to the vibration frequency of the crystal oscillator that continuously changes depending on the mass of the particles are suppressed. A crystal resonator for a monitor, characterized in that at least one plate surface of the crystal resonator is held through a soft material in order to suppress the vibration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13005284U JPS6144926U (en) | 1984-08-28 | 1984-08-28 | crystal oscillator for monitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13005284U JPS6144926U (en) | 1984-08-28 | 1984-08-28 | crystal oscillator for monitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6144926U true JPS6144926U (en) | 1986-03-25 |
| JPH0342036Y2 JPH0342036Y2 (en) | 1991-09-03 |
Family
ID=30688661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13005284U Granted JPS6144926U (en) | 1984-08-28 | 1984-08-28 | crystal oscillator for monitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6144926U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012142733A (en) * | 2010-12-28 | 2012-07-26 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibrator, film thickness sensor, etching amount sensor and film thickness detection method and etching amount detection method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5488790A (en) * | 1977-12-26 | 1979-07-14 | Seiko Instr & Electronics Ltd | Resonant frequency adjusting method for crystal oscillator |
| JPS58117714A (en) * | 1982-01-06 | 1983-07-13 | Hitachi Ltd | Construction of crystal plate head |
-
1984
- 1984-08-28 JP JP13005284U patent/JPS6144926U/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5488790A (en) * | 1977-12-26 | 1979-07-14 | Seiko Instr & Electronics Ltd | Resonant frequency adjusting method for crystal oscillator |
| JPS58117714A (en) * | 1982-01-06 | 1983-07-13 | Hitachi Ltd | Construction of crystal plate head |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012142733A (en) * | 2010-12-28 | 2012-07-26 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibrator, film thickness sensor, etching amount sensor and film thickness detection method and etching amount detection method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0342036Y2 (en) | 1991-09-03 |
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