JPS61133559U - - Google Patents
Info
- Publication number
- JPS61133559U JPS61133559U JP1466185U JP1466185U JPS61133559U JP S61133559 U JPS61133559 U JP S61133559U JP 1466185 U JP1466185 U JP 1466185U JP 1466185 U JP1466185 U JP 1466185U JP S61133559 U JPS61133559 U JP S61133559U
- Authority
- JP
- Japan
- Prior art keywords
- crystal resonator
- monitoring
- utility
- model registration
- damping material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 9
- 238000012544 monitoring process Methods 0.000 claims description 5
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- 238000013016 damping Methods 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims 1
- 239000007779 soft material Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例の真空蒸着装置に用
いるモニタ用水晶振動子の側断面図、第２図は第
１図のＤ―Ｄ線矢示断面図、第３図は第１図に示
す振動子の底面図、第４図は第１図に示すモニタ
用水晶振動子を用いた本考案の真空蒸着装置にお
けるモニタ用水晶振動子の周波数低下率および通
電電流の変化を示す図、第５図は真空蒸着装置の
概略構成図、第６図ａ，ｂは蒸着源に対して被蒸
着体を平行に配置した時の蒸着質比を説明する図
、第７図は従来の真空蒸着装置におけるモニタ用
水晶振動子の周波数変化と通電電流の変化を示す
図である。
１…真空容器、４…被蒸着体、５…モニタ用水
晶振動子、７…蒸発源、８…熱源、１１…水晶片
、１２…制振材。
FIG. 1 is a sectional side view of a monitoring crystal resonator used in a vacuum evaporation apparatus according to an embodiment of the present invention, FIG. 2 is a sectional view taken along the line DD in FIG. 1, and FIG. 4 is a bottom view of the vibrator shown in FIG. Figure 5 is a schematic configuration diagram of a vacuum evaporation apparatus, Figures 6a and b are diagrams explaining the deposition quality ratio when the object to be deposited is arranged parallel to the evaporation source, and Figure 7 is a diagram of conventional vacuum evaporation. It is a figure which shows the frequency change of the crystal resonator for a monitor in an apparatus, and the change of an energizing current. DESCRIPTION OF SYMBOLS 1... Vacuum container, 4... Evaporation target object, 5... Crystal resonator for monitoring, 7... Evaporation source, 8... Heat source, 11... Crystal piece, 12... Damping material.
Claims (1)
子を配設し、蒸発源から発生した粒子を上記被蒸
着体およびモニタ用水晶振動子の板面に形成した
電極に付着させ上記モニタ用水晶振動子における
電極への質量付加効果による振動周波数の低下量
から上記被蒸着体に付着した薄膜の量を検出する
ものにおいて、上記モニタ用水晶振動子の少なく
とも一側の板面に不要振動を抑制する制振材を設
けたことを特徴とする真空蒸着装置。 (2) 実用新案登録請求の範囲第１項記載のもの
において、制振材はモニタ用水晶振動子の主面の
外周縁に当接する弾性を有するリング状の軟性物
質である真空蒸着装置。 (3) 実用新案登録請求の範囲第１項記載のもの
において、制振材はモニタ用水晶振動子の主面に
塗布または蒸着した真空蒸着装置。[Scope of Claim for Utility Model Registration] (1) A body to be evaporated and a monitoring crystal resonator are arranged in a vacuum container, and particles generated from an evaporation source are applied to the plate surfaces of the body to be deposited and the crystal resonator for monitoring. In the apparatus for detecting the amount of a thin film attached to the vapor deposition object from the amount of decrease in vibration frequency due to the effect of adding mass to the electrode in the monitoring crystal oscillator by attaching it to the formed electrode, at least A vacuum evaporation device characterized in that a damping material for suppressing unnecessary vibrations is provided on one plate surface. (2) Utility model registration Claim 1 In the vacuum evaporation device, the vibration damping material is a ring-shaped soft material having elasticity that comes into contact with the outer periphery of the main surface of a monitor crystal resonator. (3) Utility Model Registration Claim 1: A vacuum deposition device in which the damping material is coated or deposited on the main surface of a monitor crystal resonator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1466185U JPS61133559U (en) | 1985-02-06 | 1985-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1466185U JPS61133559U (en) | 1985-02-06 | 1985-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61133559U true JPS61133559U (en) | 1986-08-20 |
Family
ID=30499790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1466185U Pending JPS61133559U (en) | 1985-02-06 | 1985-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61133559U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58117714A (en) * | 1982-01-06 | 1983-07-13 | Hitachi Ltd | Construction of crystal plate head |
-
1985
- 1985-02-06 JP JP1466185U patent/JPS61133559U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58117714A (en) * | 1982-01-06 | 1983-07-13 | Hitachi Ltd | Construction of crystal plate head |
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