JPH0210119Y2 - - Google Patents
Info
- Publication number
- JPH0210119Y2 JPH0210119Y2 JP6350683U JP6350683U JPH0210119Y2 JP H0210119 Y2 JPH0210119 Y2 JP H0210119Y2 JP 6350683 U JP6350683 U JP 6350683U JP 6350683 U JP6350683 U JP 6350683U JP H0210119 Y2 JPH0210119 Y2 JP H0210119Y2
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- deposition apparatus
- viewing window
- permanent magnet
- transparent member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007740 vapor deposition Methods 0.000 claims description 21
- 239000002184 metal Substances 0.000 description 11
- 239000011521 glass Substances 0.000 description 7
- 230000007547 defect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Description
【考案の詳細な説明】 本考案は蒸着装置に関するものである。[Detailed explanation of the idea] The present invention relates to a vapor deposition apparatus.
真空槽内において、真空蒸着法やイオンプレー
テイング法、スパツタリング法等により、磁性体
金属を蒸発して高分子プラスチツクフイルムや
紙、金属板に付着させる蒸着装置は、通常、内部
の蒸着状態を監視等するために覗き窓が設けられ
ている。 Vapor deposition equipment that uses vacuum evaporation, ion plating, sputtering, etc. in a vacuum chamber to evaporate magnetic metal and adhere it to polymeric plastic film, paper, or metal plates usually monitors the internal evaporation state. A viewing window is provided for viewing.
この覗き窓は、従来、真空槽の１部をガラスに
したものである。ところで、真空槽内において磁
性体金属が蒸発すると、上方に拡散し、このガラ
スにもその１部が堆積する。ガラスの表面に磁性
体金属粒子が堆積すると、透明度が低下して内部
が監視し難くなるので、装置を使用する毎にガラ
スの表面を拭かなければならないという欠点があ
り、また、蒸着に時間がかかるような場合には使
用中に内部を見るのが困難になるほどガラスに磁
性体金属が付着することがあり、蒸着不良等の原
因となる欠点があつた。 Conventionally, this viewing window is a part of a vacuum chamber made of glass. By the way, when the magnetic metal evaporates in the vacuum chamber, it diffuses upward, and a portion of it also deposits on the glass. If magnetic metal particles are deposited on the glass surface, the transparency will decrease and it will be difficult to monitor the inside, so there is a disadvantage that the glass surface must be wiped every time the device is used, and the deposition process will take a long time. In such cases, magnetic metal may adhere to the glass to the extent that it becomes difficult to see inside the glass during use, resulting in defects such as poor vapor deposition.
本考案は、以上の欠点を改良し、蒸発した磁性
体金属の付着による透明度の低下を防止しうる蒸
着装置用の覗き窓の提供を目的とするものであ
る。 The present invention aims to improve the above-mentioned drawbacks and to provide a viewing window for a vapor deposition apparatus that can prevent a decrease in transparency due to adhesion of evaporated magnetic metal.
本考案は、上記の目的を達成するために、蒸着
装置用の覗き窓において、透明部材と、該透明部
材の内側に取り付けられた永久磁石とを有するこ
とを特徴とする蒸着装置用の覗き窓を提供するも
のである。 In order to achieve the above object, the present invention provides a viewing window for a vapor deposition apparatus, which includes a transparent member and a permanent magnet attached to the inside of the transparent member. It provides:
以下、本考案の実施例を図面に基づいて説明す
る。 Hereinafter, embodiments of the present invention will be described based on the drawings.
第１図において、１は蒸着装置である。２は、
この蒸着装置１の壁の一部に設けられた覗き窓で
あり、ガラス材やプラスチツク材等の透明部材３
と、この透明部材３を蒸着装置１に固定するため
のリング状の蓋４と、透明部材３が直接蒸着装置
１に蓋４により押し付けられて損傷しないように
設けられたリング状のパツキン５と、透明部材３
の内側に配置され蒸着装置１に着脱自在に取り付
けられたリング状の永久磁石６とからなる。 In FIG. 1, 1 is a vapor deposition apparatus. 2 is
This is a viewing window provided in a part of the wall of this vapor deposition apparatus 1, and a transparent member 3 made of glass material, plastic material, etc.
A ring-shaped lid 4 for fixing the transparent member 3 to the vapor deposition apparatus 1; and a ring-shaped gasket 5 provided to prevent the transparent member 3 from being damaged by being directly pressed against the vapor deposition apparatus 1 by the lid 4. , transparent member 3
A ring-shaped permanent magnet 6 is disposed inside the vapor deposition apparatus 1 and is detachably attached to the vapor deposition apparatus 1.
すなわち、本考案は上記の通りの構成であるの
で、蒸着装置１内で磁性体金属を蒸発させた場
合、覗き窓２の近傍に蒸発してきた磁性体金属は
透明部材３に付着せず永久磁石６に付着する。そ
れ故、この永久磁石６を取り外すだけで、磁性体
金属を除去でき作業が簡単である。また、長時間
蒸着装置１を使用しても覗き窓２の透明部材３が
磁性体金属によつて曇ることなく、蒸着装置１内
部の監視を確実に行なえ、監視ミス等による蒸着
不良等を防止できる。 That is, since the present invention has the above-described configuration, when magnetic metal is evaporated in the vapor deposition apparatus 1, the magnetic metal evaporated near the viewing window 2 does not adhere to the transparent member 3 and is attached to the permanent magnet. Attach to 6. Therefore, just by removing this permanent magnet 6, the magnetic metal can be removed, making the work easy. Furthermore, even if the vapor deposition apparatus 1 is used for a long period of time, the transparent member 3 of the observation window 2 will not be clouded by magnetic metal, and the inside of the vapor deposition apparatus 1 can be reliably monitored, thereby preventing defects in vapor deposition due to monitoring errors, etc. can.
なお、永久磁石７は、リング状に限らず、例え
ば第２図に示す通り格子状であつてもよい。 It should be noted that the permanent magnet 7 is not limited to a ring shape but may be, for example, a grid shape as shown in FIG. 2.
以上の通り、本考案によれば、永久磁石に蒸発
した磁性体金属を付着させることにより、磁性体
金属の除去が容易で、長時間使用してもほとんど
曇ることがなく内部を確実に監視しうる蒸着装置
用の覗き窓が得られる。 As described above, according to the present invention, by attaching evaporated magnetic metal to a permanent magnet, the magnetic metal can be easily removed, and the interior can be reliably monitored with almost no fogging even when used for a long time. A viewing window for a liquid vapor deposition apparatus is obtained.
第１図は本考案の実施例の側面断面図、第２図
は本考案の他の実施例に用いる永久磁石の平面図
を示す。
１……蒸着装置、２……覗き窓、３……透明部
材、６，７……永久磁石。
FIG. 1 is a side sectional view of an embodiment of the present invention, and FIG. 2 is a plan view of a permanent magnet used in another embodiment of the present invention. 1... Vapor deposition device, 2... Viewing window, 3... Transparent member, 6, 7... Permanent magnet.
Claims (1)
該透明部材の内側に取り付けられた永久磁石と
を有することを特徴とする蒸着装置用の覗き
窓。 (2) 永久磁石がリング状である実用新案登録請求
の範囲第１項記載の蒸着装置用の覗き窓。 (3) 永久磁石が格子状である実用新案登録請求の
範囲第１項記載の蒸着装置用の覗き窓。[Scope of claims for utility model registration] (1) A viewing window for a vapor deposition device, which includes a transparent member;
A viewing window for a vapor deposition apparatus, comprising a permanent magnet attached to the inside of the transparent member. (2) A viewing window for a vapor deposition apparatus according to claim 1, wherein the permanent magnet is ring-shaped. (3) A viewing window for a vapor deposition apparatus according to claim 1 of the utility model registration claim, in which the permanent magnet is in the form of a grid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6350683U JPS59169349U (en) | 1983-04-27 | 1983-04-27 | Peephole for vapor deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6350683U JPS59169349U (en) | 1983-04-27 | 1983-04-27 | Peephole for vapor deposition equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59169349U JPS59169349U (en) | 1984-11-13 |
| JPH0210119Y2 true JPH0210119Y2 (en) | 1990-03-13 |
Family
ID=30193692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6350683U Granted JPS59169349U (en) | 1983-04-27 | 1983-04-27 | Peephole for vapor deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59169349U (en) |
-
1983
- 1983-04-27 JP JP6350683U patent/JPS59169349U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59169349U (en) | 1984-11-13 |
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