JPH0419543Y2 - - Google Patents

Description

[Detailed description of the invention] A pellicle frame characterized in that a flat surface for attaching a pellicle is cut out with an inclined surface so that the inner peripheral side thereof is lower than the flat surface.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of an embodiment of the present invention, FIGS. 2 and 3 are perspective views and plan views thereof, FIG.
5 and 6 are a sectional view, a perspective view, and a plan view of a conventional example. 1...Pericle frame, 2...Pericle, 3
...adhesive, 4...flat surface, 5...slanted surface.

Claims (1)

[Claims for Utility Model Registration] <Industrial Application Field> The present invention relates to a frame on which a pellicle is stretched to prevent dust of a photomask used in the manufacture of integrated circuits, etc. <Prior art> In printing exposure equipment for manufacturing integrated circuits, small dust adhering to the image surface of a photomask reduces the accuracy of the etched image and causes defective products, as well as requiring dust removal work. This tends to damage the photomask itself, reducing its lifespan. For this reason, a pellicle made of transparent resin has conventionally been interposed in the optical path on the image side of the photomask. This pellicle is an extremely thin polymer film with a thickness of 0.5 to 10 μm, and is used with its periphery supported by a metal or plastic pellicle frame. 4 to 6 are a sectional view, a perspective view, and a plan view of a conventional example of such a pellicle frame 10. This pellicle frame 10 has an annular shape as a whole, and an upper surface 11 thereof is formed flat, and an adhesive 12 is applied to the upper surface 11 so that the peripheral edge of the pellicle 13 is attached. . <Problems to be Solved by the Invention> Due to the function of the pellicle, it is not allowed for the adhesive to protrude inside the pellicle frame 10 because it will block the optical path. Conventional pellicle frame 10
In this case, the amount of the adhesive 12 applied is limited in order to prevent the adhesive from running out. As a result, a narrow gap is created between the pellicle and the upper surface of the pellicle frame where the pellicle is not bonded, and foreign matter gets caught in this gap, and this foreign matter cannot be removed even with nitrogen gas blowing, which poses a problem. In addition, the adhesive surface becomes irregular and the appearance deteriorates. The present invention was made in consideration of the above circumstances, and aims to provide a pellicle frame that eliminates the attachment of foreign matter to the upper surface to which a pellicle is bonded, and that has an improved appearance. <Means for Solving the Problems> In order to achieve the above object, the present invention is based on a method in which the inner peripheral side of the flat surface on which the adhesive for pellicle attachment is applied is cut out with an inclined surface so as to be lower than the flat surface. It is characterized by being formed by <Function> Adhesive is applied to the entire surface of the flat surface, but because the inner peripheral surface is lower, excess adhesive that protrudes from the flat surface flows down the slope, increasing the surface area and easily solidifying. . Since the inclined surface has a large area, the adhesive that protrudes onto the inclined surface adheres to the inner peripheral side of the inclined surface and hardens, and does not protrude into the optical path. <Example> Hereinafter, the present invention will be specifically described with reference to an illustrative example. FIG. 1 is a sectional view of an embodiment of the present invention, FIG. 2 is a perspective view thereof, and FIG. 3 is a plan view thereof. The pellicle frame 1 is formed into an annular shape and is entirely made of metal or plastic. The upper surface of this pellicle frame 1 consists of a flat surface 4 on the outer circumferential side and an inclined surface 5 on the inner circumferential side. In this case, the inclined surface 5 on the inner circumferential side is formed to be lower than the flat surface 4 on the outer circumferential side, and in this embodiment, it is lowered linearly. An adhesive 3 is applied to the flat surface 4 on the outer circumferential side, and the pellicle 2 is adhered by this adhesive 3. On the other hand, no adhesive is applied to the inclined surface 5 on the inner peripheral side. In this way, by forming the inner circumferential side lower than the flat surface on which the adhesive is applied, excess adhesive that protrudes from the flat surface will not stick to the inner circumferential side and protrude into the optical path. . Therefore, since the adhesive can be applied to the entire flat surface, the adhesion of the pellicle is strengthened, there is no room for foreign matter to get caught, and the appearance is improved. In the above embodiment, the pellicle frame is formed into an annular shape, but it may be formed into a rectangular annular shape such as a square or hexagon. <Effects of the invention> As described above, according to the invention, since the inner peripheral side is lower than the flat surface on which the adhesive is applied due to the slope, even if the adhesive protrudes inward from the flat surface, It flows down the slope, increasing the surface area and making it easier to solidify. Since the sloped surface does not take much time to process and can have a large area, the adhesive does not flow outside the sloped surface and does not interfere with exposure. Therefore, since the adhesive can be applied to the entire surface of the flat surface, the adhesion strength is strengthened, and there is no possibility of foreign matter getting caught in the flat surface, and the appearance is improved. In addition, in the present invention, the flat surface for attaching the pellicle is cut out with an inclined surface so that the inner peripheral side is lower than the flat surface.
A wide gap is formed between the attached pellicle and the inclined surface, and foreign matter that has entered this gap can be easily removed by blowing with a gas such as nitrogen gas.