JPS59169349U - Peephole for vapor deposition equipment - Google Patents
Peephole for vapor deposition equipmentInfo
- Publication number
- JPS59169349U JPS59169349U JP6350683U JP6350683U JPS59169349U JP S59169349 U JPS59169349 U JP S59169349U JP 6350683 U JP6350683 U JP 6350683U JP 6350683 U JP6350683 U JP 6350683U JP S59169349 U JPS59169349 U JP S59169349U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- peephole
- deposition equipment
- permanent magnet
- deposition apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は本考案の実施例の側面断面図、第2図は本考案
の他の実施例に用いる永久磁石の平面図を示す。
1・・・蒸着装置、2・・・覗き窓、3・・・透明部材
、6゜7・・・永久磁石。FIG. 1 is a side sectional view of an embodiment of the present invention, and FIG. 2 is a plan view of a permanent magnet used in another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Vapor deposition device, 2... Peephole, 3... Transparent member, 6°7... Permanent magnet.
Claims (3)
明部材の内側に取り付けられた永久磁石とを有すること
を特徴とする蒸着装置用の覗き窓。(1) A viewing window for a vapor deposition apparatus, comprising a transparent member and a permanent magnet attached to the inside of the transparent member.
囲第1項記載の蒸着装置用の覗き忽。(2) A viewing box for a vapor deposition apparatus according to claim 1, wherein the permanent magnet is ring-shaped.
第1項記載の蒸着装置用の覗き窓。(3) A viewing window for a vapor deposition apparatus according to claim 1, wherein the permanent magnet is in the form of a grid.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6350683U JPS59169349U (en) | 1983-04-27 | 1983-04-27 | Peephole for vapor deposition equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6350683U JPS59169349U (en) | 1983-04-27 | 1983-04-27 | Peephole for vapor deposition equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59169349U true JPS59169349U (en) | 1984-11-13 |
JPH0210119Y2 JPH0210119Y2 (en) | 1990-03-13 |
Family
ID=30193692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6350683U Granted JPS59169349U (en) | 1983-04-27 | 1983-04-27 | Peephole for vapor deposition equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59169349U (en) |
-
1983
- 1983-04-27 JP JP6350683U patent/JPS59169349U/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0210119Y2 (en) | 1990-03-13 |
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