JPS59169349U - Peephole for vapor deposition equipment - Google Patents

Peephole for vapor deposition equipment

Info

Publication number
JPS59169349U
JPS59169349U JP6350683U JP6350683U JPS59169349U JP S59169349 U JPS59169349 U JP S59169349U JP 6350683 U JP6350683 U JP 6350683U JP 6350683 U JP6350683 U JP 6350683U JP S59169349 U JPS59169349 U JP S59169349U
Authority
JP
Japan
Prior art keywords
vapor deposition
peephole
deposition equipment
permanent magnet
deposition apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6350683U
Other languages
Japanese (ja)
Other versions
JPH0210119Y2 (en
Inventor
実 長田
千代倉 守成
Original Assignee
日立コンデンサ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立コンデンサ株式会社 filed Critical 日立コンデンサ株式会社
Priority to JP6350683U priority Critical patent/JPS59169349U/en
Publication of JPS59169349U publication Critical patent/JPS59169349U/en
Application granted granted Critical
Publication of JPH0210119Y2 publication Critical patent/JPH0210119Y2/ja
Granted legal-status Critical Current

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  • Physical Vapour Deposition (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案の実施例の側面断面図、第2図は本考案
の他の実施例に用いる永久磁石の平面図を示す。 1・・・蒸着装置、2・・・覗き窓、3・・・透明部材
、6゜7・・・永久磁石。
FIG. 1 is a side sectional view of an embodiment of the present invention, and FIG. 2 is a plan view of a permanent magnet used in another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Vapor deposition device, 2... Peephole, 3... Transparent member, 6°7... Permanent magnet.

Claims (3)

【実用新案登録請求の範囲】[Scope of utility model registration request] (1)蒸着装置用の覗き窓において、透明部材と、該透
明部材の内側に取り付けられた永久磁石とを有すること
を特徴とする蒸着装置用の覗き窓。
(1) A viewing window for a vapor deposition apparatus, comprising a transparent member and a permanent magnet attached to the inside of the transparent member.
(2)永久磁石がリング状である実用新案登録請求の範
囲第1項記載の蒸着装置用の覗き忽。
(2) A viewing box for a vapor deposition apparatus according to claim 1, wherein the permanent magnet is ring-shaped.
(3)永久磁石が格子状である実用新案登録請求の範囲
第1項記載の蒸着装置用の覗き窓。
(3) A viewing window for a vapor deposition apparatus according to claim 1, wherein the permanent magnet is in the form of a grid.
JP6350683U 1983-04-27 1983-04-27 Peephole for vapor deposition equipment Granted JPS59169349U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6350683U JPS59169349U (en) 1983-04-27 1983-04-27 Peephole for vapor deposition equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6350683U JPS59169349U (en) 1983-04-27 1983-04-27 Peephole for vapor deposition equipment

Publications (2)

Publication Number Publication Date
JPS59169349U true JPS59169349U (en) 1984-11-13
JPH0210119Y2 JPH0210119Y2 (en) 1990-03-13

Family

ID=30193692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6350683U Granted JPS59169349U (en) 1983-04-27 1983-04-27 Peephole for vapor deposition equipment

Country Status (1)

Country Link
JP (1) JPS59169349U (en)

Also Published As

Publication number Publication date
JPH0210119Y2 (en) 1990-03-13

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