JPS5814218A - 流量制御装置 - Google Patents
流量制御装置Info
- Publication number
- JPS5814218A JPS5814218A JP11134681A JP11134681A JPS5814218A JP S5814218 A JPS5814218 A JP S5814218A JP 11134681 A JP11134681 A JP 11134681A JP 11134681 A JP11134681 A JP 11134681A JP S5814218 A JPS5814218 A JP S5814218A
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- flow
- flow path
- output signal
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims abstract description 9
- 239000012530 fluid Substances 0.000 claims abstract description 8
- 230000005856 abnormality Effects 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 30
- 238000010586 diagram Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B9/00—Safety arrangements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11134681A JPS5814218A (ja) | 1981-07-16 | 1981-07-16 | 流量制御装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11134681A JPS5814218A (ja) | 1981-07-16 | 1981-07-16 | 流量制御装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5814218A true JPS5814218A (ja) | 1983-01-27 |
JPS6312284B2 JPS6312284B2 (enrdf_load_stackoverflow) | 1988-03-18 |
Family
ID=14558858
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11134681A Granted JPS5814218A (ja) | 1981-07-16 | 1981-07-16 | 流量制御装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5814218A (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02271492A (ja) * | 1989-04-13 | 1990-11-06 | Kubota Corp | カップ式自動販売機におけるカップミキシング方法 |
JPH03282696A (ja) * | 1990-03-29 | 1991-12-12 | Kubota Corp | カップ式自動販売機 |
-
1981
- 1981-07-16 JP JP11134681A patent/JPS5814218A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6312284B2 (enrdf_load_stackoverflow) | 1988-03-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7826986B2 (en) | Method and system for operating a mass flow controller | |
US9175997B2 (en) | Self-monitoring flow measuring arrangement and method for its operation | |
JP2015509250A (ja) | 質量流量コントローラを通る流量を実時間で監視するシステムおよび方法 | |
JP3182717B2 (ja) | 調節弁異常検出方法および検出装置 | |
JPH08166309A (ja) | 導圧管の詰まり診断機構付き差圧測定装置 | |
JPS5814218A (ja) | 流量制御装置 | |
JP5874193B2 (ja) | 流量制御装置および流量センサユニット | |
JPS5814210A (ja) | 流量制御装置 | |
US6904810B2 (en) | Purge type vortex flowmeter | |
JP2005291924A (ja) | 漏れ検査システム | |
JP3147275B2 (ja) | 差圧検出器診断装置 | |
JP2818083B2 (ja) | 流量測定装置 | |
JP3192989B2 (ja) | 流量計 | |
JPH08278173A (ja) | ガス安全装置 | |
JPS63235800A (ja) | マスフロ−コントロ−ラ− | |
JP3195244B2 (ja) | 流量検出装置 | |
JP5403858B2 (ja) | 差圧検出装置 | |
JPH02141637A (ja) | 弁リーク検出装置 | |
JPH08178782A (ja) | 差圧測定装置 | |
JPH04313107A (ja) | マスフローコントローラ | |
JPH0314010A (ja) | マスフローコントローラ | |
JP3063514B2 (ja) | 圧力センサによる流量測定方法 | |
JP4336022B2 (ja) | ガスメータ | |
JPH0198928A (ja) | 漏水検出機能付給水メータ | |
JPH04235611A (ja) | マスフローコントローラ |