JPS58126981A - 薄膜製造装置 - Google Patents

薄膜製造装置

Info

Publication number
JPS58126981A
JPS58126981A JP57008344A JP834482A JPS58126981A JP S58126981 A JPS58126981 A JP S58126981A JP 57008344 A JP57008344 A JP 57008344A JP 834482 A JP834482 A JP 834482A JP S58126981 A JPS58126981 A JP S58126981A
Authority
JP
Japan
Prior art keywords
film
cylindrical
thin film
magnetic metal
film manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57008344A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0240740B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Miyama
博 深山
Yasuhiko Nakayama
中山　靖彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57008344A priority Critical patent/JPS58126981A/ja
Publication of JPS58126981A publication Critical patent/JPS58126981A/ja
Publication of JPH0240740B2 publication Critical patent/JPH0240740B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP57008344A 1982-01-21 1982-01-21 薄膜製造装置 Granted JPS58126981A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57008344A JPS58126981A (ja) 1982-01-21 1982-01-21 薄膜製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57008344A JPS58126981A (ja) 1982-01-21 1982-01-21 薄膜製造装置

Publications (2)

Publication Number Publication Date
JPS58126981A true JPS58126981A (ja) 1983-07-28
JPH0240740B2 JPH0240740B2 (enrdf_load_stackoverflow) 1990-09-13

Family

ID=11690592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57008344A Granted JPS58126981A (ja) 1982-01-21 1982-01-21 薄膜製造装置

Country Status (1)

Country Link
JP (1) JPS58126981A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501708A (enrdf_load_stackoverflow) * 1973-05-04 1975-01-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501708A (enrdf_load_stackoverflow) * 1973-05-04 1975-01-09

Also Published As

Publication number Publication date
JPH0240740B2 (enrdf_load_stackoverflow) 1990-09-13

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