JPS58126981A - Thin film manufacturing device - Google Patents

Abstract

PURPOSE:To attempt the high crystallization of a magnetic metallic film formed by a titled device, by providing an adhesion preventing plate having an opening between a cylindrical can and an evaporation source, and further providing adhesion preventing rollers between the can and the vicinity of the opening of the adhesion preventing plate. CONSTITUTION:A cylindrical can 11 is rotated and a high molecular film 9 is sent out from a feeding roll 10. The film is run along the surface of the can 11 and taken up on a take-up roll 12. Magnetic metallic material 19 is sputtered by a sputtering electrode 13, and vapor-deposited on the film through the opening of an adhesion preventing plate 14. At this time, vapor deposition or adhesion of sputtered material coming around is prevented by adhesion preventing rollers 15, 16 which are provided at incoming part and outgoing part of the film 9 at the opening of the adhesion preventing plate 14, and which are rotated in contact with the film 9. Consequently, the crystallinity of the vapor-deposited metallic material on the film 9 is improved. Installation of incoming side roller 15 only is also effective.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a thin film manufacturing apparatus, and a thin film manufacturing apparatus useful for manufacturing thin films of magnetic recording media having a magnetic metal thin film as a recording layer, particularly magnetic recording media such as long magnetic tapes. The purpose of this study is to improve the crystallinity of thin films.

The case of a magnetic metal thin film will be mainly described below. In recent years, with the trend toward higher recording density in magnetic recording devices, research and development has been focused on metal thin film type magnetic recording media, in contrast to the conventionally used coating type recording media in which acicular crystals of γ-Fe2O3 are adhered to a substrate together with a binder. It is being done. These magnetic recording media are made by forming a thin film of magnetic metal material on a non-magnetic substrate by means such as vacuum evaporation, sputtering, or ion blating, and the recording layer can be made thinner than in coating-type media. This makes it advantageous in terms of high density. In addition, compared to conventional longitudinal recording, vacuum evaporation method,
It has also been proposed to form a perpendicularly magnetized recording layer using means such as the scattering/regulating method, and this method enables high-density recording about 10 times that of conventional magnetic recording methods.

Here, as means for forming these magnetic metal materials, in addition to wet methods such as plating, methods using vacuum technology such as vacuum evaporation, sputtering, and ion grating methods are adopted, but these methods are 31゛- Simply thinning a magnetic metal material using the two methods does not necessarily provide the desired characteristics. In particular, magnetic recording materials are required to have high saturation magnetism, high coercive force, etc., and for this purpose, high crystallinity is often required as a magnetic metal film. For example, in a CoCr film for perpendicular magnetization recording, it has been reported that the angular half-width of the C-axis oriented dust (the angular width at which the diffraction (1972 Tohoku Branch Federation Conference of Electrical Related Societies - IB 15 "Crystal Orientation of CoCr Perpendicular Magnetization Film") Therefore, the challenge is how to efficiently form a magnetic metal film with high crystallinity on a substrate. It becomes.

FIG. 1 shows a conventional thin film manufacturing apparatus used for forming magnetic recording media and the like. As for the internal structure of the Pelger, a film running system is composed of a supply roll 2 that sends out the polymer film 1, a cylindrical can 3 that heats or cools the film 1, and a take-up roll 4 that winds the film 1. . Further, an evaporation source 5 of a magnetic metal material was installed at a position facing the cylindrical can 3, and in this apparatus, a sputtering electrode was installed for sputtering.

Between the cylindrical can 3 and the sputtering electrode 6, there is a deposition prevention plate 6 having an opening corresponding to the sputtering electrode in order to prevent the sputtered magnetic metal material from adhering to unnecessary parts inside the Pelger. is installed. If this adhesion prevention plate 6 comes into contact with the film 1 running on the cylindrical can 3, it may cause scratches on the film 1, so the cylindrical can 3 is
It is installed about IB apart. Inside the Pelger is 1X
It is evacuated from the exhaust lower to a vacuum of about 10-'torr,
A gas inlet 8 is installed to introduce various gases into the Pelger so that sputtering can be performed at a gas pressure of about 1×10 to I×10 torr. Next, using such an apparatus, a magnetic metal film was formed on the polymer film under the conditions shown below. 1 or less margin 6 =; Under the above conditions, CoCr alloy films were continuously formed with a thickness of 0.5 μm on the polymer film, and for these films,
The degree of C-axis crystal orientation of the film was evaluated using an X-ray defractometer. Figure 2 shows the measured data. The horizontal axis in the graph is the X-ray reflection angle 2θ, and the vertical axis is the X-ray reflection intensity. shows.

From this result, the C-axis oriented dust of the CoCr alloy film manufactured using the conventional manufacturing equipment described above has a half-width of angular distribution of 1.
6 (after 1#), the crystallinity was considerably inferior, and it could not be said to be sufficient as a manufacturing apparatus for magnetic recording media.

The present invention improves the above-mentioned problems and uses a thin film manufacturing apparatus such as a vacuum evaporation apparatus, a sputtering apparatus, and an ion blating apparatus that continuously forms a thin film of magnetic metal or the like on a polymer film. The purpose of this is to achieve high crystallization.

As an example of the present invention, FIG. 3 shows the internal structure of a Pelger in a thin film manufacturing apparatus used in experiments. The configuration of each part is the first
The device is basically the same as the conventional example shown in the figure, and includes a supply roll 10 for feeding out the polymer film 9, a cylindrical can 11 for heating or cooling the film 9, and a take-up roll 12 for winding the film 9. A film running system is constructed from the following. Furthermore, in this device, an evaporation source 13 of magnetic metal material is installed at a position facing the cylindrical can 11.
A sputtering electrode was installed for the sputtering method. In addition, an opening corresponding to the sputtering electrode 13 is provided between the cylindrical can 11 and the snow vine electrode 13 in order to prevent the sputtered magnetic metal material from adhering to unnecessary parts inside the Pelger. An anti-adhesion plate 14 is installed.

In addition, it prevents the magnetic metal material sputtered from the gap between the end of the adhesion prevention plate 14 and the can 11 from getting into the surrounding areas 7, -; and unnecessarily adhering to the polymer film 9.
For this reason, anti-adhesive rollers 15 and 16 are installed at the film entrance and delivery parts of the opening of the anti-adhesive plate 14 to rotate in contact with the polymer film 9 on the cylindrical can 11. Using the thin film manufacturing apparatus of the present invention, first, the inside of the Pelger was evacuated to a vacuum of about I x 10-6 torr through the exhaust port 17, and then I was evacuated through the gas inlet port 18.
Gas is introduced to about X 10-5-I did. The sputtering conditions were the same as those in the comparative example.
The degree of C-axis crystal orientation of the Cr alloy film was measured using an X-ray defractometer, and as shown in Figure 4, the horizontal axis of the graph is the X-ray reflection angle 2θ, and the vertical axis is the X-ray reflection intensity. Compared to the data obtained in the comparative example (Figure 2), the X-ray reflection intensity is about 6 times higher, and the half-width of the angular distribution of the C-axis orientation is within 1o0. Data showing improved crystallinity was obtained.

Furthermore, since the adhesion prevention rollers 16 and 16 rotate in contact with the polymer film 9 on the cylindrical can 11, no scratches or the like occur on the surface of the polymer film 9, and a high-quality magnetic recording medium can be obtained. Ta.

In the above embodiment, the anti-stick roller was explained as rotating in synchronization with the cylindrical can.
The present invention is effective even if they are installed at a distance of about 1M, and there is no necessity to completely eliminate the gap between the adhesion prevention plate and the cylindrical can. However, even in this case, even if the polymer film were to come into contact with the anti-adhesive roller, the anti-adhesive roller rotates in synchronization with the anti-adhesive roller, which prevents scratches from occurring on the surface of the polymer film and maintains its quality as a magnetic medium. maintained.

In addition, the anti-adhesive rollers do not need to be installed on both sides of the opening of the anti-adhesive plate, and can be used to prevent the formation of a film. The present invention is effective as long as it is installed at least in the tart section.

9/, -.

Furthermore, although the present invention has been described mainly in the case of producing a magnetic recording medium, it is not limited thereto, and can be applied to other apparatuses for producing thin films that require crystallinity.

As described above, the present invention eliminates the need for vapor-deposited or sputtered vapor-deposited materials inside a bell jar in a thin-film manufacturing apparatus that forms a continuous thin film of a magnetic metal material or the like on the surface of a polymer film using vacuum technology. Between the deposition prevention plate and the cylindrical can, a deposition prevention roller is installed between the deposition prevention plate and the cylindrical can to prevent vapor-deposited or sputtered material from getting around and adhering to the gap between them. It is attached to the opening and has the advantage of improving the crystallinity of the magnetic metal material formed on the polymer film.

[Brief explanation of drawings]

FIG. 1 is a schematic diagram of a conventional thin film manufacturing apparatus, FIG. 2 is a diagram showing the degree of crystal orientation of a magnetic metal film obtained using the conventional apparatus, and FIG. 3 is a diagram of a thin film according to an embodiment of the present invention. FIG. 4 is a schematic block diagram of the manufacturing apparatus, and is a diagram showing the degree of crystal orientation of a magnetic metal film obtained using the apparatus described above. 9... Polymer film, 1o... Supply roll, 12... Winding roll, 13...
... Evaporation source, 14... Deposition prevention plate, 11...
・Cylindrical can, l! ;, /≦...Adhesion prevention roller, 19...Magnetic metal material. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Fig. 4 Fig. 2 Mulberry angle 2~・Size Fig. 3 Fig. 4 Game? θ (°)

Claims (1)

[Claims] First and second rolls are provided between the first and second rolls, and the film-like substrate, which is supplied by the first roll and wound by the second roll, is placed along the cylindrical surface. the cylindrical can, and an evaporation source provided opposite the cylindrical can, and an opening between the cylindrical can and the evaporation source in a portion facing the evaporation source. An anti-adhesive plate is provided, and the opening is located between the anti-adhesive plate and the cylindrical can.
A thin film manufacturing apparatus characterized in that an anti-adhesive roller is installed at least in the vicinity of the first roll.