JPS58123753A - 半導体集積回路 - Google Patents

半導体集積回路

Info

Publication number
JPS58123753A
JPS58123753A JP591882A JP591882A JPS58123753A JP S58123753 A JPS58123753 A JP S58123753A JP 591882 A JP591882 A JP 591882A JP 591882 A JP591882 A JP 591882A JP S58123753 A JPS58123753 A JP S58123753A
Authority
JP
Japan
Prior art keywords
integrated circuit
metal wiring
ion implantation
layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP591882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0481335B2 (enrdf_load_stackoverflow
Inventor
Masayoshi Yagyu
正義 柳生
Takehisa Hayashi
剛久 林
Hironori Tanaka
田中　広紀
Akira Masaki
亮 正木
Masahiro Hirayama
昌宏 平山
Masayuki Ino
井野　正行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Nippon Telegraph and Telephone Corp filed Critical Hitachi Ltd
Priority to JP591882A priority Critical patent/JPS58123753A/ja
Publication of JPS58123753A publication Critical patent/JPS58123753A/ja
Publication of JPH0481335B2 publication Critical patent/JPH0481335B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/3011—Impedance

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP591882A 1982-01-20 1982-01-20 半導体集積回路 Granted JPS58123753A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP591882A JPS58123753A (ja) 1982-01-20 1982-01-20 半導体集積回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP591882A JPS58123753A (ja) 1982-01-20 1982-01-20 半導体集積回路

Publications (2)

Publication Number Publication Date
JPS58123753A true JPS58123753A (ja) 1983-07-23
JPH0481335B2 JPH0481335B2 (enrdf_load_stackoverflow) 1992-12-22

Family

ID=11624267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP591882A Granted JPS58123753A (ja) 1982-01-20 1982-01-20 半導体集積回路

Country Status (1)

Country Link
JP (1) JPS58123753A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60124851A (ja) * 1983-12-09 1985-07-03 Toshiba Corp マイクロ波集積回路装置
JPS637650A (ja) * 1986-06-27 1988-01-13 Nippon Telegr & Teleph Corp <Ntt> 半導体集積回路の配線構造
US5942773A (en) * 1996-06-04 1999-08-24 Fujitsu Limited Field effect transistor with reduced delay variation
US6200838B1 (en) 1998-11-13 2001-03-13 Fujitsu Quantum Devices Limited Compound semiconductor device and method of manufacturing the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5141977A (ja) * 1974-10-07 1976-04-08 Suwa Seikosha Kk Handotaisochi
JPS5643757A (en) * 1979-09-18 1981-04-22 Nec Corp Gallium arsenic type integrated circuit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5141977A (ja) * 1974-10-07 1976-04-08 Suwa Seikosha Kk Handotaisochi
JPS5643757A (en) * 1979-09-18 1981-04-22 Nec Corp Gallium arsenic type integrated circuit

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60124851A (ja) * 1983-12-09 1985-07-03 Toshiba Corp マイクロ波集積回路装置
JPS637650A (ja) * 1986-06-27 1988-01-13 Nippon Telegr & Teleph Corp <Ntt> 半導体集積回路の配線構造
US5942773A (en) * 1996-06-04 1999-08-24 Fujitsu Limited Field effect transistor with reduced delay variation
US6200838B1 (en) 1998-11-13 2001-03-13 Fujitsu Quantum Devices Limited Compound semiconductor device and method of manufacturing the same

Also Published As

Publication number Publication date
JPH0481335B2 (enrdf_load_stackoverflow) 1992-12-22

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