JPS58118799A - 除湿型熱風乾燥方法とその装置 - Google Patents

除湿型熱風乾燥方法とその装置

Info

Publication number
JPS58118799A
JPS58118799A JP179482A JP179482A JPS58118799A JP S58118799 A JPS58118799 A JP S58118799A JP 179482 A JP179482 A JP 179482A JP 179482 A JP179482 A JP 179482A JP S58118799 A JPS58118799 A JP S58118799A
Authority
JP
Japan
Prior art keywords
regeneration
air
hot air
gas
humidity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP179482A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6145480B2 (enrdf_load_stackoverflow
Inventor
小関　康雄
章 山田
燦吉 高橋
修三 大島
北岸　外茂治
大西　利一
夏野　憲治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP179482A priority Critical patent/JPS58118799A/ja
Publication of JPS58118799A publication Critical patent/JPS58118799A/ja
Publication of JPS6145480B2 publication Critical patent/JPS6145480B2/ja
Granted legal-status Critical Current

Links

JP179482A 1982-01-11 1982-01-11 除湿型熱風乾燥方法とその装置 Granted JPS58118799A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP179482A JPS58118799A (ja) 1982-01-11 1982-01-11 除湿型熱風乾燥方法とその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP179482A JPS58118799A (ja) 1982-01-11 1982-01-11 除湿型熱風乾燥方法とその装置

Publications (2)

Publication Number Publication Date
JPS58118799A true JPS58118799A (ja) 1983-07-14
JPS6145480B2 JPS6145480B2 (enrdf_load_stackoverflow) 1986-10-08

Family

ID=11511469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP179482A Granted JPS58118799A (ja) 1982-01-11 1982-01-11 除湿型熱風乾燥方法とその装置

Country Status (1)

Country Link
JP (1) JPS58118799A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6083304A (en) * 1998-01-26 2000-07-04 Kankyo Co., Ltd. Method and apparatus for dehumidifying air
JP2002273150A (ja) * 2001-03-21 2002-09-24 Aisin Seiki Co Ltd 除湿乾燥機
JP2008183516A (ja) * 2007-01-30 2008-08-14 Dainippon Screen Mfg Co Ltd 乾燥空気供給装置およびこれを備えた基板処理装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6083304A (en) * 1998-01-26 2000-07-04 Kankyo Co., Ltd. Method and apparatus for dehumidifying air
US6235086B1 (en) 1998-01-26 2001-05-22 Kankyo Co., Ltd. Method and apparatus for dehumidifying air
USRE38893E1 (en) 1998-01-26 2005-11-29 Kankyo Co., Ltd. Method and apparatus for dehumidifying air
JP2002273150A (ja) * 2001-03-21 2002-09-24 Aisin Seiki Co Ltd 除湿乾燥機
JP2008183516A (ja) * 2007-01-30 2008-08-14 Dainippon Screen Mfg Co Ltd 乾燥空気供給装置およびこれを備えた基板処理装置

Also Published As

Publication number Publication date
JPS6145480B2 (enrdf_load_stackoverflow) 1986-10-08

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