JPS58118731U - Ｌｓｉ検査装置 - Google Patents

Ｌｓｉ検査装置

Info

Publication number
JPS58118731U
JPS58118731U JP1415382U JP1415382U JPS58118731U JP S58118731 U JPS58118731 U JP S58118731U JP 1415382 U JP1415382 U JP 1415382U JP 1415382 U JP1415382 U JP 1415382U JP S58118731 U JPS58118731 U JP S58118731U
Authority
JP
Japan
Prior art keywords
inspection equipment
lsi inspection
circuit
photomask
lsi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1415382U
Other languages
English (en)
Japanese (ja)
Other versions
JPS633156Y2 (OSRAM
Inventor
峰生 野本
進 相内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1415382U priority Critical patent/JPS58118731U/ja
Publication of JPS58118731U publication Critical patent/JPS58118731U/ja
Application granted granted Critical
Publication of JPS633156Y2 publication Critical patent/JPS633156Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1415382U 1982-02-05 1982-02-05 Ｌｓｉ検査装置 Granted JPS58118731U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1415382U JPS58118731U (ja) 1982-02-05 1982-02-05 Ｌｓｉ検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1415382U JPS58118731U (ja) 1982-02-05 1982-02-05 Ｌｓｉ検査装置

Publications (2)

Publication Number Publication Date
JPS58118731U true JPS58118731U (ja) 1983-08-13
JPS633156Y2 JPS633156Y2 (OSRAM) 1988-01-26

Family

ID=30026627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1415382U Granted JPS58118731U (ja) 1982-02-05 1982-02-05 Ｌｓｉ検査装置

Country Status (1)

Country Link
JP (1) JPS58118731U (OSRAM)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5232271A (en) * 1975-09-08 1977-03-11 Hitachi Ltd Inspection method and equipment for photomask pattern
JPS5447579A (en) * 1977-09-22 1979-04-14 Hitachi Ltd Develping condiction inspecting method in photoetching

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5232271A (en) * 1975-09-08 1977-03-11 Hitachi Ltd Inspection method and equipment for photomask pattern
JPS5447579A (en) * 1977-09-22 1979-04-14 Hitachi Ltd Develping condiction inspecting method in photoetching

Also Published As

Publication number Publication date
JPS633156Y2 (OSRAM) 1988-01-26

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